Fast deposition of amorphous and crystalline carbon and spectroscopic analysis of the plasma

A.J.M. Buuron, J.J. Beulens, N.T. Guerassimov, C. Chauveau, M.C.M. Sanden, van de, D.C. Schram

Research output: Contribution to conferencePoster

Original languageEnglish
Publication statusPublished - 1992
EventGordon Conference on Plasma Chemistry, August 10-14, 1992, New London, NH, USA - New London, NH, United States
Duration: 10 Aug 199214 Aug 1992

Conference

ConferenceGordon Conference on Plasma Chemistry, August 10-14, 1992, New London, NH, USA
CountryUnited States
CityNew London, NH
Period10/08/9214/08/92

Bibliographical note

Proceedings of the Gordon Conference on Plasma Chemistry, New London, USA, 10-14 August 1992

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