Fast deposition of a-Si:H using and expanding Ar/H2 cascaded plasma

Research output: Contribution to conferencePosterAcademic

Original languageEnglish
Publication statusPublished - 1992
EventGordon Conference on Plasma Chemistry, August 10-14, 1992, New London, NH, USA - New London, NH, United States
Duration: 10 Aug 199214 Aug 1992

Conference

ConferenceGordon Conference on Plasma Chemistry, August 10-14, 1992, New London, NH, USA
Country/TerritoryUnited States
CityNew London, NH
Period10/08/9214/08/92

Bibliographical note

Proceedings of the Gordon Conference on Plasma Chemistry, New London, USA, 10-14 August 1992

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