Fast deposition of a-Si:H using an expanding Ar/H2 cascaded arc plasma

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Original languageEnglish
Title of host publicationESCAMPIG : 11th, St. Petersburg, Russia, 25-29 August 1992
Pages441-442
Publication statusPublished - 1992

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