| Original language | English |
|---|---|
| Title of host publication | ESCAMPIG : 11th, St. Petersburg, Russia, 25-29 August 1992 |
| Pages | 441-442 |
| Publication status | Published - 1992 |
Fast deposition of a-Si:H using an expanding Ar/H2 cascaded arc plasma
G.J. Meeusen, M.C.M. Sanden, van de, D.C. Schram
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic
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