Fast deposition of a-C:H : increasing quality with increasing growth rate

J.W.A.M. Gielen, W.M.M. Kessels, A. Graaf, de, J.L. Longueville, M.C.M. Sanden, van de, D.C. Schram

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Original languageEnglish
Title of host publicationAVS, American Vacuum Society : 43rd national symposium, Philadelphia, October 14-18, 1996 : Abstracts
Pages167
Publication statusPublished - 1996

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