Fast deposition of a-C:H : increasing quality with increasing growth rate

J.W.A.M. Gielen, W.M.M. Kessels, A. Graaf, de, J.L. Longueville, M.C.M. Sanden, van de, D.C. Schram

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

34 Downloads (Pure)

Original language	English
Title of host publication	AVS, American Vacuum Society : 43rd national symposium, Philadelphia, October 14-18, 1996 : Abstracts
Pages	167
Publication status	Published - 1996

Access to Document

@inproceedings{f7845ba06f1041ca81ec3913a29ce234,

title = "Fast deposition of a-C:H : increasing quality with increasing growth rate",

author = "J.W.A.M. Gielen and W.M.M. Kessels and {Graaf, de}, A. and J.L. Longueville and {Sanden, van de}, M.C.M. and D.C. Schram",

year = "1996",

language = "English",

pages = "167",

booktitle = "AVS, American Vacuum Society : 43rd national symposium, Philadelphia, October 14-18, 1996 : Abstracts",

}

TY - GEN

T1 - Fast deposition of a-C:H : increasing quality with increasing growth rate

AU - Gielen, J.W.A.M.

AU - Kessels, W.M.M.

AU - Graaf, de, A.

AU - Longueville, J.L.

AU - Sanden, van de, M.C.M.

AU - Schram, D.C.

PY - 1996

Y1 - 1996

M3 - Conference contribution

SP - 167

BT - AVS, American Vacuum Society : 43rd national symposium, Philadelphia, October 14-18, 1996 : Abstracts

ER -