Fast deposition of a-C:H : increasing quality with increasing growth rate

J.W.A.M. Gielen, W.M.M. Kessels, A. Graaf, de, J.L. Longueville, M.C.M. Sanden, van de, D.C. Schram

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

26 Downloads (Pure)
Original languageEnglish
Title of host publicationAVS, American Vacuum Society : 43rd national symposium, Philadelphia, October 14-18, 1996 : Abstracts
Pages167
Publication statusPublished - 1996

Cite this

Gielen, J. W. A. M., Kessels, W. M. M., Graaf, de, A., Longueville, J. L., Sanden, van de, M. C. M., & Schram, D. C. (1996). Fast deposition of a-C:H : increasing quality with increasing growth rate. In AVS, American Vacuum Society : 43rd national symposium, Philadelphia, October 14-18, 1996 : Abstracts (pp. 167)
Gielen, J.W.A.M. ; Kessels, W.M.M. ; Graaf, de, A. ; Longueville, J.L. ; Sanden, van de, M.C.M. ; Schram, D.C. / Fast deposition of a-C:H : increasing quality with increasing growth rate. AVS, American Vacuum Society : 43rd national symposium, Philadelphia, October 14-18, 1996 : Abstracts. 1996. pp. 167
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title = "Fast deposition of a-C:H : increasing quality with increasing growth rate",
author = "J.W.A.M. Gielen and W.M.M. Kessels and {Graaf, de}, A. and J.L. Longueville and {Sanden, van de}, M.C.M. and D.C. Schram",
year = "1996",
language = "English",
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booktitle = "AVS, American Vacuum Society : 43rd national symposium, Philadelphia, October 14-18, 1996 : Abstracts",

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Gielen, JWAM, Kessels, WMM, Graaf, de, A, Longueville, JL, Sanden, van de, MCM & Schram, DC 1996, Fast deposition of a-C:H : increasing quality with increasing growth rate. in AVS, American Vacuum Society : 43rd national symposium, Philadelphia, October 14-18, 1996 : Abstracts. pp. 167.

Fast deposition of a-C:H : increasing quality with increasing growth rate. / Gielen, J.W.A.M.; Kessels, W.M.M.; Graaf, de, A.; Longueville, J.L.; Sanden, van de, M.C.M.; Schram, D.C.

AVS, American Vacuum Society : 43rd national symposium, Philadelphia, October 14-18, 1996 : Abstracts. 1996. p. 167.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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T1 - Fast deposition of a-C:H : increasing quality with increasing growth rate

AU - Gielen, J.W.A.M.

AU - Kessels, W.M.M.

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AU - Longueville, J.L.

AU - Sanden, van de, M.C.M.

AU - Schram, D.C.

PY - 1996

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M3 - Conference contribution

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BT - AVS, American Vacuum Society : 43rd national symposium, Philadelphia, October 14-18, 1996 : Abstracts

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Gielen JWAM, Kessels WMM, Graaf, de A, Longueville JL, Sanden, van de MCM, Schram DC. Fast deposition of a-C:H : increasing quality with increasing growth rate. In AVS, American Vacuum Society : 43rd national symposium, Philadelphia, October 14-18, 1996 : Abstracts. 1996. p. 167