Fast atomic deposition of thin layers

M.C.M. Sanden, van de; J.J. Beulens; A.J.M. Buuron; G.J. Meeusen; Z. Qing; M.J. Graaf, de; R.F.G. Meulenbroeks; D.C. Schram

Fast atomic deposition of thin layers

M.C.M. Sanden, van de, J.J. Beulens, A.J.M. Buuron, G.J. Meeusen, Z. Qing, M.J. Graaf, de, R.F.G. Meulenbroeks, D.C. Schram

Plasma & Materials Processing

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	English
Title of host publication	Plasmaphysik für Anwender : Seminar, 6.-9. September 1992, Physikzentrum Bad Honnef
Place of Publication	Bochum
Publisher	Arbeitsgemeinschaft Plasmaphysik
Pages	31-33
Publication status	Published - 1992

Cite this

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title = "Fast atomic deposition of thin layers",

author = "\{Sanden, van de\}, M.C.M. and J.J. Beulens and A.J.M. Buuron and G.J. Meeusen and Z. Qing and \{Graaf, de\}, M.J. and R.F.G. Meulenbroeks and D.C. Schram",

year = "1992",

language = "English",

pages = "31--33",

booktitle = "Plasmaphysik f{\"u}r Anwender : Seminar, 6.-9. September 1992, Physikzentrum Bad Honnef",

publisher = "Arbeitsgemeinschaft Plasmaphysik",

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TY - GEN

T1 - Fast atomic deposition of thin layers

AU - Sanden, van de, M.C.M.

AU - Beulens, J.J.

AU - Buuron, A.J.M.

AU - Meeusen, G.J.

AU - Qing, Z.

AU - Graaf, de, M.J.

AU - Meulenbroeks, R.F.G.

AU - Schram, D.C.

PY - 1992

Y1 - 1992

M3 - Conference contribution

SP - 31

EP - 33

BT - Plasmaphysik für Anwender : Seminar, 6.-9. September 1992, Physikzentrum Bad Honnef

PB - Arbeitsgemeinschaft Plasmaphysik

CY - Bochum

ER -