Fabrication technology of a slot waveguide modulator in InP Membranes on Silicon (IMOS)

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Abstract

For the InP Membranes On Silicon (IMOS) platform [1], we developed an electrooptic modulator based on a slot-waveguide with a high nonlinear polymer. A variety of fabrication techniques are used, including electron beam lithography (EBL), optical lithography (OL), dry etching and metallization. The fabrication of such modulator requires a complex fabrication process. In this work we present and discuss the most important fabrication steps.
Original languageEnglish
Title of host publication18th European Conference on Integrated Optics (ECIO 2016), 18-20 May 2016, Warsaw, Poland
Pages223/224
Number of pages2
Publication statusPublished - 21 May 2016
Event18th European Conference on Integrated Optics (ECIO 2016) - Warsaw University of Technology, Warsaw, Poland
Duration: 18 May 201620 May 2016
Conference number: 18
http://ecio2016.imio.pw.edu.pl/

Conference

Conference18th European Conference on Integrated Optics (ECIO 2016)
Abbreviated titleECIO 2016
Country/TerritoryPoland
CityWarsaw
Period18/05/1620/05/16
Internet address

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