Abstract
For the InP Membranes On Silicon (IMOS) platform [1], we developed an electrooptic modulator based on a slot-waveguide with a high nonlinear polymer. A variety of fabrication techniques are used, including electron beam lithography (EBL), optical lithography (OL), dry etching and metallization. The fabrication of such modulator requires a complex fabrication process. In this work we present and discuss the most important fabrication steps.
| Original language | English |
|---|---|
| Title of host publication | 18th European Conference on Integrated Optics (ECIO 2016), 18-20 May 2016, Warsaw, Poland |
| Pages | 223/224 |
| Number of pages | 2 |
| Publication status | Published - 21 May 2016 |
| Event | 18th European Conference on Integrated Optics (ECIO 2016) - Warsaw University of Technology, Warsaw, Poland Duration: 18 May 2016 → 20 May 2016 Conference number: 18 http://ecio2016.imio.pw.edu.pl/ |
Conference
| Conference | 18th European Conference on Integrated Optics (ECIO 2016) |
|---|---|
| Abbreviated title | ECIO 2016 |
| Country/Territory | Poland |
| City | Warsaw |
| Period | 18/05/16 → 20/05/16 |
| Internet address |