Fabrication of pure gold nanostructures by electron beam induced deposition with Au(C0)CI precusor: deposition characteristics and primary beam scattering effects

J.J.L. Mulders; Marcel Veerhoek; E.G.T. Bosch; P.H.F. Trompenaars

doi:10.1088/0022-3727/45/47/475301

Fabrication of pure gold nanostructures by electron beam induced deposition with Au(C0)CI precusor: deposition characteristics and primary beam scattering effects

J.J.L. Mulders, Marcel Veerhoek, E.G.T. Bosch, P.H.F. Trompenaars

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

In the search for a direct write, high-purity electron beam induced deposition (EBID) process, a new gold precursor that is commonly available is investigated. This precursor, Au(CO)Cl, can indeed be used to produce a high-purity golden nanostructure (>95 at% Au), at a wide variety of electron beam parameters. The use of a mass spectrometer to determine the components of the actual precursor vapour showed that the Au(CO)Cl density in the vapour is very low (estimated at

Original language	English
Article number	47301
Pages (from-to)	47301
Number of pages	7
Journal	Journal of Physics D: Applied Physics
Volume	45
Issue number	47
DOIs	https://doi.org/10.1088/0022-3727/45/47/475301
Publication status	Published - 2012

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abstract = "In the search for a direct write, high-purity electron beam induced deposition (EBID) process, a new gold precursor that is commonly available is investigated. This precursor, Au(CO)Cl, can indeed be used to produce a high-purity golden nanostructure (>95 at% Au), at a wide variety of electron beam parameters. The use of a mass spectrometer to determine the components of the actual precursor vapour showed that the Au(CO)Cl density in the vapour is very low (estimated at",

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Fabrication of pure gold nanostructures by electron beam induced deposition with Au(C0)CI precusor: deposition characteristics and primary beam scattering effects. / Mulders, J.J.L.; Veerhoek, Marcel; Bosch, E.G.T.; Trompenaars, P.H.F.

In: Journal of Physics D: Applied Physics, Vol. 45, No. 47, 47301, 2012, p. 47301.

Research output: Contribution to journal › Article › Academic › peer-review

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AU - Trompenaars, P.H.F.

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JO - Journal of Physics D: Applied Physics

JF - Journal of Physics D: Applied Physics

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Fabrication of pure gold nanostructures by electron beam induced deposition with Au(C0)CI precusor: deposition characteristics and primary beam scattering effects

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