Fabrication of pure gold nanostructures by electron beam induced deposition with Au(C0)CI precusor: deposition characteristics and primary beam scattering effects

J.J.L. Mulders; Marcel Veerhoek; E.G.T. Bosch; P.H.F. Trompenaars

doi:10.1088/0022-3727/45/47/475301

Fabrication of pure gold nanostructures by electron beam induced deposition with Au(C0)CI precusor: deposition characteristics and primary beam scattering effects

J.J.L. Mulders, Marcel Veerhoek, E.G.T. Bosch, P.H.F. Trompenaars

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

In the search for a direct write, high-purity electron beam induced deposition (EBID) process, a new gold precursor that is commonly available is investigated. This precursor, Au(CO)Cl, can indeed be used to produce a high-purity golden nanostructure (>95 at% Au), at a wide variety of electron beam parameters. The use of a mass spectrometer to determine the components of the actual precursor vapour showed that the Au(CO)Cl density in the vapour is very low (estimated at

Original language	English
Article number	47301
Pages (from-to)	47301
Number of pages	7
Journal	Journal of Physics D: Applied Physics
Volume	45
Issue number	47
DOIs	https://doi.org/10.1088/0022-3727/45/47/475301
Publication status	Published - 2012

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@article{4cca9ff4646844359b25a83d925fc170,

title = "Fabrication of pure gold nanostructures by electron beam induced deposition with Au(C0)CI precusor: deposition characteristics and primary beam scattering effects",

abstract = "In the search for a direct write, high-purity electron beam induced deposition (EBID) process, a new gold precursor that is commonly available is investigated. This precursor, Au(CO)Cl, can indeed be used to produce a high-purity golden nanostructure (>95 at% Au), at a wide variety of electron beam parameters. The use of a mass spectrometer to determine the components of the actual precursor vapour showed that the Au(CO)Cl density in the vapour is very low (estimated at",

author = "J.J.L. Mulders and Marcel Veerhoek and E.G.T. Bosch and P.H.F. Trompenaars",

year = "2012",

doi = "10.1088/0022-3727/45/47/475301",

language = "English",

volume = "45",

pages = "47301",

journal = "Journal of Physics D: Applied Physics",

issn = "0022-3727",

publisher = "Institute of Physics",

number = "47",

}

Fabrication of pure gold nanostructures by electron beam induced deposition with Au(C0)CI precusor: deposition characteristics and primary beam scattering effects. / Mulders, J.J.L.; Veerhoek, Marcel; Bosch, E.G.T. et al.

In: Journal of Physics D: Applied Physics, Vol. 45, No. 47, 47301, 2012, p. 47301.

Research output: Contribution to journal › Article › Academic › peer-review

TY - JOUR

T1 - Fabrication of pure gold nanostructures by electron beam induced deposition with Au(C0)CI precusor: deposition characteristics and primary beam scattering effects

AU - Mulders, J.J.L.

AU - Veerhoek, Marcel

AU - Bosch, E.G.T.

AU - Trompenaars, P.H.F.

PY - 2012

Y1 - 2012

N2 - In the search for a direct write, high-purity electron beam induced deposition (EBID) process, a new gold precursor that is commonly available is investigated. This precursor, Au(CO)Cl, can indeed be used to produce a high-purity golden nanostructure (>95 at% Au), at a wide variety of electron beam parameters. The use of a mass spectrometer to determine the components of the actual precursor vapour showed that the Au(CO)Cl density in the vapour is very low (estimated at

AB - In the search for a direct write, high-purity electron beam induced deposition (EBID) process, a new gold precursor that is commonly available is investigated. This precursor, Au(CO)Cl, can indeed be used to produce a high-purity golden nanostructure (>95 at% Au), at a wide variety of electron beam parameters. The use of a mass spectrometer to determine the components of the actual precursor vapour showed that the Au(CO)Cl density in the vapour is very low (estimated at

U2 - 10.1088/0022-3727/45/47/475301

DO - 10.1088/0022-3727/45/47/475301

M3 - Article

VL - 45

SP - 47301

JO - Journal of Physics D: Applied Physics

JF - Journal of Physics D: Applied Physics

SN - 0022-3727

IS - 47

M1 - 47301

ER -

Fabrication of pure gold nanostructures by electron beam induced deposition with Au(C0)CI precusor: deposition characteristics and primary beam scattering effects

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