Abstract
In the search for a direct write, high-purity electron beam induced deposition (EBID) process, a new gold precursor that is commonly available is investigated. This precursor, Au(CO)Cl, can indeed be used to produce a high-purity golden nanostructure (>95 at% Au), at a wide variety of electron beam parameters. The use of a mass spectrometer to determine the components of the actual precursor vapour showed that the Au(CO)Cl density in the vapour is very low (estimated at
Original language | English |
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Article number | 47301 |
Pages (from-to) | 47301 |
Number of pages | 7 |
Journal | Journal of Physics D: Applied Physics |
Volume | 45 |
Issue number | 47 |
DOIs | |
Publication status | Published - 2012 |