Fabrication of pure gold nanostructures by electron beam induced deposition with Au(C0)CI precusor: deposition characteristics and primary beam scattering effects

J.J.L. Mulders, Marcel Veerhoek, E.G.T. Bosch, P.H.F. Trompenaars

Research output: Contribution to journalArticleAcademicpeer-review

21 Citations (Scopus)
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Abstract

In the search for a direct write, high-purity electron beam induced deposition (EBID) process, a new gold precursor that is commonly available is investigated. This precursor, Au(CO)Cl, can indeed be used to produce a high-purity golden nanostructure (>95 at% Au), at a wide variety of electron beam parameters. The use of a mass spectrometer to determine the components of the actual precursor vapour showed that the Au(CO)Cl density in the vapour is very low (estimated at
Original languageEnglish
Article number47301
Pages (from-to)47301
Number of pages7
JournalJournal of Physics D: Applied Physics
Volume45
Issue number47
DOIs
Publication statusPublished - 2012

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