Abstract
In the search for a direct write, high-purity electron beam induced deposition (EBID) process, a new gold precursor that is commonly available is investigated. This precursor, Au(CO)Cl, can indeed be used to produce a high-purity golden nanostructure (>95 at% Au), at a wide variety of electron beam parameters. The use of a mass spectrometer to determine the components of the actual precursor vapour showed that the Au(CO)Cl density in the vapour is very low (estimated at
| Original language | English |
|---|---|
| Article number | 47301 |
| Pages (from-to) | 47301 |
| Number of pages | 7 |
| Journal | Journal of Physics D: Applied Physics |
| Volume | 45 |
| Issue number | 47 |
| DOIs | |
| Publication status | Published - 2012 |
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Mulders, J. J. L., Veerhoek, M., Bosch, E. G. T., & Trompenaars, P. H. F. (2012). Fabrication of pure gold nanostructures by electron beam induced deposition with Au(C0)CI precusor: deposition characteristics and primary beam scattering effects. Journal of Physics D: Applied Physics, 45(47), 47301. [47301]. https://doi.org/10.1088/0022-3727/45/47/475301