Fabrication and characterization of infrared and sub-mm spiderweb bolometers with low Tc superconducting transition edge thermometers

F.B. Kiewiet, M.P. Bruijn, H.F.C. Hoevers, A.C. Bento, W.A. Mels, P.A.J. Korte de

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)

Abstract

Spiderweb bolometers with a superconducting transition edge thermometer combine a high sensitivity and absorption efficiency for far infrared and sub-mm radiation with a low susceptibility to high energetic particles. They are among the most promising detectors today for future astronomy applications. In this paper we present our fabrication process for a fully integrated bolometer consisting of absorber, thermometer and suspension structure, based on micromachining of a silicon nitride membrane and various thin film deposition and etching steps. The optimization of Ti/Au transition edge thermometers is described, as well as electrical measurements on a fully integrated bolometer, indicating an electrical noise equivalent power of 2×10 -17 W/vHz at an operating temperature of 270 mK.
Original languageEnglish
Pages (from-to)3862-3865
Number of pages4
JournalIEEE Transactions on Applied Superconductivity
Volume9
Issue number2-3
DOIs
Publication statusPublished - 1999

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