Fabrication and characterization of infrared and sub-mm spiderweb bolometers with low Tc superconducting transition edge thermometers

F.B. Kiewiet; M.P. Bruijn; H.F.C. Hoevers; A.C. Bento; W.A. Mels; P.A.J. Korte de

doi:10.1109/77.783870

Fabrication and characterization of infrared and sub-mm spiderweb bolometers with low Tc superconducting transition edge thermometers

F.B. Kiewiet, M.P. Bruijn, H.F.C. Hoevers, A.C. Bento, W.A. Mels, P.A.J. Korte de

Coherence and Quantum Technology

Research output: Contribution to journal › Article › Academic › peer-review

8 Citations (Scopus)

Abstract

Spiderweb bolometers with a superconducting transition edge thermometer combine a high sensitivity and absorption efficiency for far infrared and sub-mm radiation with a low susceptibility to high energetic particles. They are among the most promising detectors today for future astronomy applications. In this paper we present our fabrication process for a fully integrated bolometer consisting of absorber, thermometer and suspension structure, based on micromachining of a silicon nitride membrane and various thin film deposition and etching steps. The optimization of Ti/Au transition edge thermometers is described, as well as electrical measurements on a fully integrated bolometer, indicating an electrical noise equivalent power of 2×10 -17 W/vHz at an operating temperature of 270 mK.

Original language	English
Pages (from-to)	3862-3865
Number of pages	4
Journal	IEEE Transactions on Applied Superconductivity
Volume	9
Issue number	2-3
DOIs	https://doi.org/10.1109/77.783870
Publication status	Published - 1999

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title = "Fabrication and characterization of infrared and sub-mm spiderweb bolometers with low Tc superconducting transition edge thermometers",

abstract = "Spiderweb bolometers with a superconducting transition edge thermometer combine a high sensitivity and absorption efficiency for far infrared and sub-mm radiation with a low susceptibility to high energetic particles. They are among the most promising detectors today for future astronomy applications. In this paper we present our fabrication process for a fully integrated bolometer consisting of absorber, thermometer and suspension structure, based on micromachining of a silicon nitride membrane and various thin film deposition and etching steps. The optimization of Ti/Au transition edge thermometers is described, as well as electrical measurements on a fully integrated bolometer, indicating an electrical noise equivalent power of 2×10 -17 W/vHz at an operating temperature of 270 mK.",

author = "F.B. Kiewiet and M.P. Bruijn and H.F.C. Hoevers and A.C. Bento and W.A. Mels and {Korte de}, P.A.J.",

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AU - Kiewiet, F.B.

AU - Bruijn, M.P.

AU - Hoevers, H.F.C.

AU - Bento, A.C.

AU - Mels, W.A.

AU - Korte de, P.A.J.

PY - 1999

Y1 - 1999

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AB - Spiderweb bolometers with a superconducting transition edge thermometer combine a high sensitivity and absorption efficiency for far infrared and sub-mm radiation with a low susceptibility to high energetic particles. They are among the most promising detectors today for future astronomy applications. In this paper we present our fabrication process for a fully integrated bolometer consisting of absorber, thermometer and suspension structure, based on micromachining of a silicon nitride membrane and various thin film deposition and etching steps. The optimization of Ti/Au transition edge thermometers is described, as well as electrical measurements on a fully integrated bolometer, indicating an electrical noise equivalent power of 2×10 -17 W/vHz at an operating temperature of 270 mK.

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JO - IEEE Transactions on Applied Superconductivity

JF - IEEE Transactions on Applied Superconductivity

IS - 2-3

ER -

Fabrication and characterization of infrared and sub-mm spiderweb bolometers with low Tc superconducting transition edge thermometers

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