Abstract
Original language | English |
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Patent number | US20080224115 |
Publication status | Published - 18 Sep 2008 |
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Fabricating a set of semiconducting nanowires, and electric device comprising a set of nanowires. / Bakkers, E.P.A.M. (Inventor); Feiner, L.F. (Inventor); Balkenende, A.R. (Inventor).
Patent No.: US20080224115.Research output: Patent › Patent publication
TY - PAT
T1 - Fabricating a set of semiconducting nanowires, and electric device comprising a set of nanowires
AU - Bakkers, E.P.A.M.
AU - Feiner, L.F.
AU - Balkenende, A.R.
PY - 2008/9/18
Y1 - 2008/9/18
N2 - The method of fabricating a set of semiconducting nanowires ( 10 ) having a desired wire diameter (d) comprises the steps of providing a set of pre-fabricated semiconducting nanowires ( 10 '), at least one pre-fabricated semiconducting nanowire having a wire diameter (d') larger than the desired wire diameter (d), and reducing the wire diameter of the at least one pre-fabricated nanowire ( 10 ') by etching, the etching being induced by light which is absorbed by the at least one pre-fabricated nanowire ( 10 '), a spectrum of the light being chosen such that the absorption of the at least one pre-fabricated nanowire being significantly reduced when the at least one pre-fabricated nanowire reaches the desired wire diameter (d). The electric device ( 100 ) may comprise a set of nanowires ( 10 ) having the desired wire diameter (d). The apparatus ( 29 ) may be used to execute the method according to the invention.
AB - The method of fabricating a set of semiconducting nanowires ( 10 ) having a desired wire diameter (d) comprises the steps of providing a set of pre-fabricated semiconducting nanowires ( 10 '), at least one pre-fabricated semiconducting nanowire having a wire diameter (d') larger than the desired wire diameter (d), and reducing the wire diameter of the at least one pre-fabricated nanowire ( 10 ') by etching, the etching being induced by light which is absorbed by the at least one pre-fabricated nanowire ( 10 '), a spectrum of the light being chosen such that the absorption of the at least one pre-fabricated nanowire being significantly reduced when the at least one pre-fabricated nanowire reaches the desired wire diameter (d). The electric device ( 100 ) may comprise a set of nanowires ( 10 ) having the desired wire diameter (d). The apparatus ( 29 ) may be used to execute the method according to the invention.
UR - http://v3.espacenet.com/publicationDetails/biblio?DB=EPODOC&adjacent=true&locale=nl_nl&FT=D&date=20080918&CC=US&NR=2008224115A1&KC=A1
M3 - Patent publication
M1 - US20080224115
ER -