Extremely low-loss vertically-tapered spot size converter in InP-based waveguide structure

F.M. Soares, F. Karouta, E.J. Geluk, J.H.C. Zantvoort, van, H. Waardt, de, M.K. Smit

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Abstract

Low-loss spot size converters (SSC) are important elements for coupling photonic integrated circuits to fibres. We have developed a Cl2-based inductively-coupled-plasma process to etch non-selectively InP and photo-resist (PR). This process was then used to transfer a vertically-tapered PR pattern into an InP/InGaAsP structure. The tapered PR pattern was made using a standard optical lithography combined with sliding-mask technique. One, 2 and 3-mm long SSCs were fabricated and characterized. Excess losses between 0.5-2 dB were measured for all SSCs. We also fabricated lateral SSCs using the same epi-structure, however these SSCs showed higher losses (>4dB/SSC).
Original languageEnglish
Title of host publicationProceedings of the 9th Annual Symposium of the IEEE/LEOS Benelux Chapter, 2-3 December 2004, Ghent, Belgium
Pages127-130
Publication statusPublished - 2004
Event9th Annual Symposium of the IEEE/LEOS Benelux Chapter, December 2-3, 2004, Ghent, Belgium - Ghent, Belgium
Duration: 2 Dec 20043 Dec 2004

Conference

Conference9th Annual Symposium of the IEEE/LEOS Benelux Chapter, December 2-3, 2004, Ghent, Belgium
Country/TerritoryBelgium
CityGhent
Period2/12/043/12/04

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