Low-loss spot size converters (SSC) are important elements for coupling photonic integrated circuits to fibres. We have developed a Cl2-based inductively-coupled-plasma process to etch non-selectively InP and photo-resist (PR). This process was then used to transfer a vertically-tapered PR pattern into an InP/InGaAsP structure. The tapered PR pattern was made using a standard optical lithography combined with sliding-mask technique. One, 2 and 3-mm long SSCs were fabricated and characterized. Excess losses between 0.5-2 dB were measured for all SSCs. We also fabricated lateral SSCs using the same epi-structure, however these SSCs showed higher losses (>4dB/SSC).
|Title of host publication||Proceedings of the 9th Annual Symposium of the IEEE/LEOS Benelux Chapter, 2-3 December 2004, Ghent, Belgium|
|Publication status||Published - 2004|
|Event||9th Annual Symposium of the IEEE/LEOS Benelux Chapter, December 2-3, 2004, Ghent, Belgium - Ghent, Belgium|
Duration: 2 Dec 2004 → 3 Dec 2004
|Conference||9th Annual Symposium of the IEEE/LEOS Benelux Chapter, December 2-3, 2004, Ghent, Belgium|
|Period||2/12/04 → 3/12/04|