Extreme ultraviolet spectra of discharge sources in xenon and tin: comparison of computer simulations and experimental results

E.R. Kieft, K. Garloff, J.J.A.M. Mullen, van der, V.Y. Banine

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Abstract

no abstract
Original languageEnglish
Title of host publicationThe 3rd International EUVL Symposium, Miyazaki, Japan, 1 – 4 November, 2004
Publication statusPublished - 2004
Eventconference; The 3rd international EUVL Symposium, Miyazaki, Japan; 2004-11-01; 2004-11-04 -
Duration: 1 Nov 20044 Nov 2004

Conference

Conferenceconference; The 3rd international EUVL Symposium, Miyazaki, Japan; 2004-11-01; 2004-11-04
Period1/11/044/11/04
OtherThe 3rd international EUVL Symposium, Miyazaki, Japan

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