Extended Nijboer-Zernike (ENZ) based mask imaging : efficient coupling of electromagnetic field solvers and the ENZ imaging algorithm

O.T.A. Janssen, S. Haver, van, A.J.E.M. Janssen, J.J.M. Braat, H.P. Urbach, S.F. Pereira

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Engineering & Materials Science