Exploiting additional actuators and sensors for nano-positioning robust motion control

R.M.A. Herpen, van, T.A.E. Oomen, E.J.G.J. Kikken, M.M.J. Wal, van de, W.H.T.M. Aangenent, M. Steinbuch

Research output: Contribution to journalArticleAcademicpeer-review

32 Citations (Scopus)
12 Downloads (Pure)


The ongoing need for miniaturization and an increase of throughput in IC-manufacturing is obstructed by performance limitations in motion control of nano-positioning wafer stages. These limitations are imposed by flexible dynamical behavior, associated with structural deformations of the nano-positioning stages. The aim of this research is to investigate limits on achievable performance in a conventional control configuration and to mitigate these limits through the use of additional actuators and sensors. To this end, a systematic framework for control design using additional actuators and sensors in the generalized plant configuration is presented, which leads to a well-posed H8H8-control optimization problem that extends conventional design approaches in a natural way and exploits physical insight to address structural deformations in weighting filter design. Through an experimental confrontation of the design framework with a prototype next-generation nano-positioning motion system, successful performance enhancement beyond the conventional limits is demonstrated.
Original languageEnglish
Pages (from-to)619-631
Number of pages13
Issue number6
Publication statusPublished - 2014


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