Experimental evaluation of reset control for improved stage performance

M.F. Heertjes, K.G.J. Gruntjens, S.J.L.M. van Loon, N. van de Wouw, W.P.M.H. Heemels

Research output: Contribution to journalConference articleAcademicpeer-review

4 Citations (Scopus)
3 Downloads (Pure)

Abstract

A reset integral controller is discussed that induces improved low-frequency disturbance rejection properties under double integrator control without giving the unwanted increase of overshoot otherwise resulting from adding an extra linear integrator. To guarantee closed-loop stability, a (conditional) reset condition is used that restricts the input-output behavior of the dynamic reset element to a [0,α]-sector with α a positive (finite) gain. As a result, stability can be guaranteed on the basis of a circle criterion-like argument and checked through (measured) frequency response data. Both stability and performance of the control design will be discussed via measurement results obtained from a wafer stage system of an industrial wafer scanner.

Original languageEnglish
Pages (from-to)93-98
Number of pages6
JournalIFAC-PapersOnLine
Volume49
Issue number13
DOIs
Publication statusPublished - 2016
Event12th IFAC Workshop on Adaptation and Learning in Control and Signal Processing (ALCOSP 2016) - Eindhoven, Netherlands
Duration: 29 Jun 20161 Jul 2016
Conference number: 12

Keywords

  • Circle criterion
  • Lyapunov stability
  • motion systems
  • reset control
  • wafer scanners

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