Experimental evaluation of reset control for improved stage performance

M.F. Heertjes; K.G.J. Gruntjens; S.J.L.M. van Loon; N. van de Wouw; W.P.M.H. Heemels

doi:10.1016/j.ifacol.2016.07.933

Experimental evaluation of reset control for improved stage performance

M.F. Heertjes, K.G.J. Gruntjens, S.J.L.M. van Loon, N. van de Wouw, W.P.M.H. Heemels

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13 Citations (Scopus)

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Abstract

A reset integral controller is discussed that induces improved low-frequency disturbance rejection properties under double integrator control without giving the unwanted increase of overshoot otherwise resulting from adding an extra linear integrator. To guarantee closed-loop stability, a (conditional) reset condition is used that restricts the input-output behavior of the dynamic reset element to a [0,α]-sector with α a positive (finite) gain. As a result, stability can be guaranteed on the basis of a circle criterion-like argument and checked through (measured) frequency response data. Both stability and performance of the control design will be discussed via measurement results obtained from a wafer stage system of an industrial wafer scanner.

Original language	English
Pages (from-to)	93-98
Number of pages	6
Journal	IFAC-PapersOnLine
Volume	49
Issue number	13
DOIs	https://doi.org/10.1016/j.ifacol.2016.07.933
Publication status	Published - 2016
Event	12th IFAC Workshop on Adaptation and Learning in Control and Signal Processing, ALCOSP 2016 - Eindhoven, Netherlands Duration: 29 Jun 2016 → 1 Jul 2016 Conference number: 12

Keywords

Circle criterion
Lyapunov stability
motion systems
reset control
wafer scanners

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10.1016/j.ifacol.2016.07.933

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title = "Experimental evaluation of reset control for improved stage performance",

abstract = "A reset integral controller is discussed that induces improved low-frequency disturbance rejection properties under double integrator control without giving the unwanted increase of overshoot otherwise resulting from adding an extra linear integrator. To guarantee closed-loop stability, a (conditional) reset condition is used that restricts the input-output behavior of the dynamic reset element to a [0,α]-sector with α a positive (finite) gain. As a result, stability can be guaranteed on the basis of a circle criterion-like argument and checked through (measured) frequency response data. Both stability and performance of the control design will be discussed via measurement results obtained from a wafer stage system of an industrial wafer scanner.",

keywords = "Circle criterion, Lyapunov stability, motion systems, reset control, wafer scanners",

author = "M.F. Heertjes and K.G.J. Gruntjens and {van Loon}, S.J.L.M. and {van de Wouw}, N. and W.P.M.H. Heemels",

year = "2016",

doi = "10.1016/j.ifacol.2016.07.933",

language = "English",

volume = "49",

pages = "93--98",

journal = "IFAC-PapersOnLine",

issn = "2405-8963",

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note = "12th IFAC Workshop on Adaptation and Learning in Control and Signal Processing, ALCOSP 2016, ALCOSP 2016 ; Conference date: 29-06-2016 Through 01-07-2016",

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T1 - Experimental evaluation of reset control for improved stage performance

AU - Heertjes, M.F.

AU - Gruntjens, K.G.J.

AU - van Loon, S.J.L.M.

AU - van de Wouw, N.

AU - Heemels, W.P.M.H.

N1 - Conference code: 12

PY - 2016

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N2 - A reset integral controller is discussed that induces improved low-frequency disturbance rejection properties under double integrator control without giving the unwanted increase of overshoot otherwise resulting from adding an extra linear integrator. To guarantee closed-loop stability, a (conditional) reset condition is used that restricts the input-output behavior of the dynamic reset element to a [0,α]-sector with α a positive (finite) gain. As a result, stability can be guaranteed on the basis of a circle criterion-like argument and checked through (measured) frequency response data. Both stability and performance of the control design will be discussed via measurement results obtained from a wafer stage system of an industrial wafer scanner.

AB - A reset integral controller is discussed that induces improved low-frequency disturbance rejection properties under double integrator control without giving the unwanted increase of overshoot otherwise resulting from adding an extra linear integrator. To guarantee closed-loop stability, a (conditional) reset condition is used that restricts the input-output behavior of the dynamic reset element to a [0,α]-sector with α a positive (finite) gain. As a result, stability can be guaranteed on the basis of a circle criterion-like argument and checked through (measured) frequency response data. Both stability and performance of the control design will be discussed via measurement results obtained from a wafer stage system of an industrial wafer scanner.

KW - Circle criterion

KW - Lyapunov stability

KW - motion systems

KW - reset control

KW - wafer scanners

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U2 - 10.1016/j.ifacol.2016.07.933

DO - 10.1016/j.ifacol.2016.07.933

M3 - Conference article

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SN - 2405-8963

VL - 49

SP - 93

EP - 98

JO - IFAC-PapersOnLine

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T2 - 12th IFAC Workshop on Adaptation and Learning in Control and Signal Processing, ALCOSP 2016

Y2 - 29 June 2016 through 1 July 2016

ER -

Experimental evaluation of reset control for improved stage performance

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