Experimental characterization of a hydrogen/argon cascaded arc plasma source

Z. Qing; M.J. Graaf, de; M.C.M. Sanden, van de; D.K. Otorbaev; D.C. Schram

doi:10.1063/1.1144949

Experimental characterization of a hydrogen/argon cascaded arc plasma source

Z. Qing, M.J. Graaf, de, M.C.M. Sanden, van de, D.K. Otorbaev, D.C. Schram

Plasma & Materials Processing

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Abstract

A H/sub 2//Ar cascaded arc plasma source has been experimentally characterized by determination of the efficiency, the electric field, and the pressure gradient of the arc. The results show that the efficiency of a H/sub 2//Ar cascaded arc drops when the hydrogen flow rate is increased. The electron temperature in the argon cascaded arc has been derived to be in the range 9000-12500 K. For a hydrogen arc, the mass dissociation degree of hydrogen molecules has been derived to be above 60%

Original language	English
Pages (from-to)	1469-1471
Journal	Review of Scientific Instruments
Volume	65
Issue number	4
DOIs	https://doi.org/10.1063/1.1144949
Publication status	Published - 1994

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title = "Experimental characterization of a hydrogen/argon cascaded arc plasma source",

abstract = "A H/sub 2//Ar cascaded arc plasma source has been experimentally characterized by determination of the efficiency, the electric field, and the pressure gradient of the arc. The results show that the efficiency of a H/sub 2//Ar cascaded arc drops when the hydrogen flow rate is increased. The electron temperature in the argon cascaded arc has been derived to be in the range 9000-12500 K. For a hydrogen arc, the mass dissociation degree of hydrogen molecules has been derived to be above 60%",

author = "Z. Qing and {Graaf, de}, M.J. and {Sanden, van de}, M.C.M. and D.K. Otorbaev and D.C. Schram",

year = "1994",

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journal = "Review of Scientific Instruments",

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AU - Qing, Z.

AU - Graaf, de, M.J.

AU - Sanden, van de, M.C.M.

AU - Otorbaev, D.K.

AU - Schram, D.C.

PY - 1994

Y1 - 1994

N2 - A H/sub 2//Ar cascaded arc plasma source has been experimentally characterized by determination of the efficiency, the electric field, and the pressure gradient of the arc. The results show that the efficiency of a H/sub 2//Ar cascaded arc drops when the hydrogen flow rate is increased. The electron temperature in the argon cascaded arc has been derived to be in the range 9000-12500 K. For a hydrogen arc, the mass dissociation degree of hydrogen molecules has been derived to be above 60%

AB - A H/sub 2//Ar cascaded arc plasma source has been experimentally characterized by determination of the efficiency, the electric field, and the pressure gradient of the arc. The results show that the efficiency of a H/sub 2//Ar cascaded arc drops when the hydrogen flow rate is increased. The electron temperature in the argon cascaded arc has been derived to be in the range 9000-12500 K. For a hydrogen arc, the mass dissociation degree of hydrogen molecules has been derived to be above 60%

U2 - 10.1063/1.1144949

DO - 10.1063/1.1144949

M3 - Article

SN - 0034-6748

VL - 65

SP - 1469

EP - 1471

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

IS - 4

ER -

Experimental characterization of a hydrogen/argon cascaded arc plasma source

Abstract

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