@article{9a0ec57091924af7bb987fea08378ccd,
title = "Expanding thermal plasma deposition of Al-doped ZnO: On the effect of the plasma chemistry on film growth mechanisms",
keywords = "deposition, diagnostics, modification, plasma, polymers",
author = "B.L. Williams and M. Ponomarev and M.A. Verheijen and H.C.M. Knoops and L.A.A. Duval and \{van de Sanden\}, M.C.M. and M. Creatore",
year = "2016",
month = jan,
doi = "10.1002/ppap.201500179",
language = "English",
volume = "13",
pages = "54--69",
journal = "Plasma Processes and Polymers",
issn = "1612-8850",
publisher = "Wiley-VCH Verlag",
number = "1",
}