Expanding thermal plasma deposition of Al-doped ZnO: On the effect of the plasma chemistry on film growth mechanisms

B.L. Williams; M. Ponomarev; M.A. Verheijen; H.C.M. Knoops; L.A.A. Duval; M.C.M. van de Sanden; M. Creatore

doi:10.1002/ppap.201500179

Expanding thermal plasma deposition of Al-doped ZnO: On the effect of the plasma chemistry on film growth mechanisms

B.L. Williams, M. Ponomarev, M.A. Verheijen, H.C.M. Knoops, L.A.A. Duval, M.C.M. van de Sanden, M. Creatore

Research output: Contribution to journal › Article › Academic › peer-review

6 Citations (Scopus)

300 Downloads (Pure)

Original language	English
Pages (from-to)	54-69
Journal	Plasma Processes and Polymers
Volume	13
Issue number	1
DOIs	https://doi.org/10.1002/ppap.201500179
Publication status	Published - Jan 2016

Keywords

deposition
diagnostics
modification
plasma
polymers

Access to Document

10.1002/ppap.201500179

publisher versionFinal published version, 3.16 MB

Cite this

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title = "Expanding thermal plasma deposition of Al-doped ZnO: On the effect of the plasma chemistry on film growth mechanisms",

keywords = "deposition, diagnostics, modification, plasma, polymers",

author = "B.L. Williams and M. Ponomarev and M.A. Verheijen and H.C.M. Knoops and L.A.A. Duval and {van de Sanden}, M.C.M. and M. Creatore",

year = "2016",

month = jan,

doi = "10.1002/ppap.201500179",

language = "English",

volume = "13",

pages = "54--69",

journal = "Plasma Processes and Polymers",

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AU - Williams, B.L.

AU - Ponomarev, M.

AU - Verheijen, M.A.

AU - Knoops, H.C.M.

AU - Duval, L.A.A.

AU - van de Sanden, M.C.M.

AU - Creatore, M.

PY - 2016/1

Y1 - 2016/1

KW - deposition

KW - diagnostics

KW - modification

KW - plasma

KW - polymers

U2 - 10.1002/ppap.201500179

DO - 10.1002/ppap.201500179

M3 - Article

SN - 1612-8850

VL - 13

SP - 54

EP - 69

JO - Plasma Processes and Polymers

JF - Plasma Processes and Polymers

IS - 1

ER -