Expanding thermal plasma deposition of Al-doped ZnO: On the effect of the plasma chemistry on film growth mechanisms

B.L. Williams, M. Ponomarev, M.A. Verheijen, H.C.M. Knoops, L.A.A. Duval, M.C.M. van de Sanden, M. Creatore

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)
178 Downloads (Pure)
Original languageEnglish
Pages (from-to)54-69
JournalPlasma Processes and Polymers
Volume13
Issue number1
DOIs
Publication statusPublished - Jan 2016

Keywords

  • deposition
  • diagnostics
  • modification
  • plasma
  • polymers

Cite this