Expanding plasma used for plasma deposition

G.M.W. Kroesen, C.J. Timmermans, D.C. Schram

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Original languageEnglish
Title of host publicationISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 2
EditorsK. Akashi, A. Kinbara
Place of PublicationTokyo
Pages1097-1099
Publication statusPublished - 1987
Event8th International Symposium on Plasma Chemistry (ISPC 8) - Tokyo, Japan
Duration: 31 Aug 19874 Sep 1987
Conference number: 8

Conference

Conference8th International Symposium on Plasma Chemistry (ISPC 8)
Abbreviated titleISPC/Tokyo 1987
CountryJapan
CityTokyo
Period31/08/874/09/87

Cite this

Kroesen, G. M. W., Timmermans, C. J., & Schram, D. C. (1987). Expanding plasma used for plasma deposition. In K. Akashi, & A. Kinbara (Eds.), ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 2 (pp. 1097-1099). Tokyo.
Kroesen, G.M.W. ; Timmermans, C.J. ; Schram, D.C. / Expanding plasma used for plasma deposition. ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 2 . editor / K. Akashi ; A. Kinbara. Tokyo, 1987. pp. 1097-1099
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year = "1987",
language = "English",
pages = "1097--1099",
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Kroesen, GMW, Timmermans, CJ & Schram, DC 1987, Expanding plasma used for plasma deposition. in K Akashi & A Kinbara (eds), ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 2 . Tokyo, pp. 1097-1099, 8th International Symposium on Plasma Chemistry (ISPC 8), Tokyo, Japan, 31/08/87.

Expanding plasma used for plasma deposition. / Kroesen, G.M.W.; Timmermans, C.J.; Schram, D.C.

ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 2 . ed. / K. Akashi; A. Kinbara. Tokyo, 1987. p. 1097-1099.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

TY - GEN

T1 - Expanding plasma used for plasma deposition

AU - Kroesen, G.M.W.

AU - Timmermans, C.J.

AU - Schram, D.C.

PY - 1987

Y1 - 1987

M3 - Conference contribution

SP - 1097

EP - 1099

BT - ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 2

A2 - Akashi, K.

A2 - Kinbara, A.

CY - Tokyo

ER -

Kroesen GMW, Timmermans CJ, Schram DC. Expanding plasma used for plasma deposition. In Akashi K, Kinbara A, editors, ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 2 . Tokyo. 1987. p. 1097-1099