Expanding plasma used for plasma deposition

G.M.W. Kroesen; C.J. Timmermans; D.C. Schram

Expanding plasma used for plasma deposition

G.M.W. Kroesen, C.J. Timmermans, D.C. Schram

Plasma & Materials Processing

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Original language	English
Title of host publication	ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 2
Editors	K. Akashi, A. Kinbara
Place of Publication	Tokyo
Pages	1097-1099
Publication status	Published - 1987
Event	8th International Symposium on Plasma Chemistry (ISPC 8), August 31-September 4, 1987, Tokyo, Japan - Tokyo, Japan Duration: 31 Aug 1987 → 4 Sept 1987 Conference number: 8

Conference

Conference	8th International Symposium on Plasma Chemistry (ISPC 8), August 31-September 4, 1987, Tokyo, Japan
Abbreviated title	ISPC/Tokyo 1987
Country/Territory	Japan
City	Tokyo
Period	31/08/87 → 4/09/87

Access to Document

590719Final published version, 132 KB

Cite this

@inproceedings{a242bb9d41ec416bbb873142af2cac59,

title = "Expanding plasma used for plasma deposition",

author = "G.M.W. Kroesen and C.J. Timmermans and D.C. Schram",

year = "1987",

language = "English",

pages = "1097--1099",

editor = "K. Akashi and A. Kinbara",

booktitle = "ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 2",

note = "8th International Symposium on Plasma Chemistry (ISPC 8), August 31-September 4, 1987, Tokyo, Japan, ISPC/Tokyo 1987 ; Conference date: 31-08-1987 Through 04-09-1987",

}

Kroesen, GMW, Timmermans, CJ & Schram, DC 1987, Expanding plasma used for plasma deposition. in K Akashi & A Kinbara (eds), ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 2 . Tokyo, pp. 1097-1099, 8th International Symposium on Plasma Chemistry (ISPC 8), August 31-September 4, 1987, Tokyo, Japan, Tokyo, Japan, 31/08/87.

TY - GEN

T1 - Expanding plasma used for plasma deposition

AU - Kroesen, G.M.W.

AU - Timmermans, C.J.

AU - Schram, D.C.

N1 - Conference code: 8

PY - 1987

Y1 - 1987

M3 - Conference contribution

SP - 1097

EP - 1099

BT - ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 2

A2 - Akashi, K.

A2 - Kinbara, A.

CY - Tokyo

T2 - 8th International Symposium on Plasma Chemistry (ISPC 8), August 31-September 4, 1987, Tokyo, Japan

Y2 - 31 August 1987 through 4 September 1987

ER -