Expanding plasma used for plasma deposition

G.M.W. Kroesen, C.J. Timmermans, D.C. Schram

Research output: Contribution to journalArticleAcademicpeer-review

24 Citations (Scopus)
73 Downloads (Pure)
Original languageEnglish
Pages (from-to)795-808
JournalPure and Applied Chemistry
Volume60
Issue number5
DOIs
Publication statusPublished - 1988

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