Exact plant inversion of flexible motion systems with a time-varying state-to-output map

Y. Kasemsinsup; M.F. Heertjes; H. Butler; S. Weiland

doi:10.1109/ECC.2016.7810663

Exact plant inversion of flexible motion systems with a time-varying state-to-output map

Y. Kasemsinsup, M.F. Heertjes, H. Butler, S. Weiland

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

9 Citations (Scopus)

13 Downloads (Pure)

Abstract

Many high-accuracy positioning systems have a target performance location that varies with time and position. A typical example is given by wafer stage positioning systems in the lithographic industry. The design of feedforward compensators for such a class of systems, i.e. flexible motion systems having Linear Time Invariant (LTI) state dynamics with Linear Time-Varying (LTV) state-to-output map, can be considerably enhanced if such time or position-varying characteristics of the systems are taken into account. In this work, a strategy to construct a feedforward controller that exactly matches the time-dependent inverse of such a system is investigated. Analysis and simulation on a simplified model show the potential performance improvement obtained with such a strategy.

Original language	English
Title of host publication	2016 European Control Conference, ECC 2016
Place of Publication	Piscataway
Publisher	Institute of Electrical and Electronics Engineers
Pages	2483-2488
Number of pages	6
ISBN (Electronic)	9781509025916
DOIs	https://doi.org/10.1109/ECC.2016.7810663
Publication status	Published - 2016
Event	15th European Control Conference (ECC 2016) - Aalborg, Denmark Duration: 29 Jun 2016 → 1 Jul 2016 Conference number: 15 http://www.ecc16.eu/index.shtml http://www.ecc16.eu/index.shtml

Conference

Conference	15th European Control Conference (ECC 2016)
Abbreviated title	ECC 2016
Country/Territory	Denmark
City	Aalborg
Period	29/06/16 → 1/07/16
Internet address	http://www.ecc16.eu/index.shtml http://www.ecc16.eu/index.shtml

Keywords

Feedforward control
Linear Time Varying systems

Access to Document

10.1109/ECC.2016.7810663

Cite this

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Kasemsinsup, Y, Heertjes, MF , Butler, H & Weiland, S 2016, Exact plant inversion of flexible motion systems with a time-varying state-to-output map. in 2016 European Control Conference, ECC 2016., 7810663, Institute of Electrical and Electronics Engineers, Piscataway, pp. 2483-2488, 15th European Control Conference (ECC 2016), Aalborg, Denmark, 29/06/16. https://doi.org/10.1109/ECC.2016.7810663

Exact plant inversion of flexible motion systems with a time-varying state-to-output map. / Kasemsinsup, Y.; Heertjes, M.F.; Butler, H.; Weiland, S.

2016 European Control Conference, ECC 2016. Piscataway : Institute of Electrical and Electronics Engineers, 2016. p. 2483-2488 7810663.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AB - Many high-accuracy positioning systems have a target performance location that varies with time and position. A typical example is given by wafer stage positioning systems in the lithographic industry. The design of feedforward compensators for such a class of systems, i.e. flexible motion systems having Linear Time Invariant (LTI) state dynamics with Linear Time-Varying (LTV) state-to-output map, can be considerably enhanced if such time or position-varying characteristics of the systems are taken into account. In this work, a strategy to construct a feedforward controller that exactly matches the time-dependent inverse of such a system is investigated. Analysis and simulation on a simplified model show the potential performance improvement obtained with such a strategy.

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Exact plant inversion of flexible motion systems with a time-varying state-to-output map

Abstract

Conference

Keywords

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