Exact plant inversion of flexible motion systems with a time-varying state-to-output map

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Many high-accuracy positioning systems have a target performance location that varies with time and position. A typical example is given by wafer stage positioning systems in the lithographic industry. The design of feedforward compensators for such a class of systems, i.e. flexible motion systems having Linear Time Invariant (LTI) state dynamics with Linear Time-Varying (LTV) state-to-output map, can be considerably enhanced if such time or position-varying characteristics of the systems are taken into account. In this work, a strategy to construct a feedforward controller that exactly matches the time-dependent inverse of such a system is investigated. Analysis and simulation on a simplified model show the potential performance improvement obtained with such a strategy.

Original languageEnglish
Title of host publication2016 European Control Conference, ECC 2016
Place of PublicationPiscataway
PublisherInstitute of Electrical and Electronics Engineers
Number of pages6
ISBN (Electronic)9781509025916
Publication statusPublished - 2016
Event15th European Control Conference (ECC 2016) - Aalborg, Denmark
Duration: 29 Jun 20161 Jul 2016
Conference number: 15


Conference15th European Control Conference (ECC 2016)
Abbreviated titleECC 2016
Internet address


  • Feedforward control
  • Linear Time Varying systems


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