Abstract
Many high-accuracy positioning systems have a target performance location that varies with time and position. A typical example is given by wafer stage positioning systems in the lithographic industry. The design of feedforward compensators for such a class of systems, i.e. flexible motion systems having Linear Time Invariant (LTI) state dynamics with Linear Time-Varying (LTV) state-to-output map, can be considerably enhanced if such time or position-varying characteristics of the systems are taken into account. In this work, a strategy to construct a feedforward controller that exactly matches the time-dependent inverse of such a system is investigated. Analysis and simulation on a simplified model show the potential performance improvement obtained with such a strategy.
Original language | English |
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Title of host publication | 2016 European Control Conference, ECC 2016 |
Place of Publication | Piscataway |
Publisher | Institute of Electrical and Electronics Engineers |
Pages | 2483-2488 |
Number of pages | 6 |
ISBN (Electronic) | 9781509025916 |
DOIs | |
Publication status | Published - 2016 |
Event | 15th European Control Conference (ECC 2016) - Aalborg, Denmark Duration: 29 Jun 2016 → 1 Jul 2016 Conference number: 15 http://www.ecc16.eu/index.shtml http://www.ecc16.eu/index.shtml |
Conference
Conference | 15th European Control Conference (ECC 2016) |
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Abbreviated title | ECC 2016 |
Country/Territory | Denmark |
City | Aalborg |
Period | 29/06/16 → 1/07/16 |
Internet address |
Keywords
- Feedforward control
- Linear Time Varying systems