Evaluation of Ion ProjectionUsing Heavy Ions Suitable for Resistless Patterning of Thin Magnetic Films

W.H. Bruenger, C. Dzionk, R. Berger, H. Grimm, A.H. Dietzel, F. Letzkus, R. Springer

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationMNE 2001, Micro- and Nanoengineering
Place of PublicationFrance, Grenoble
Publication statusPublished - 2001

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