Evaluation of Ion ProjectionUsing Heavy Ions Suitable for Resistless Patterning of Thin Magnetic Films

W.H. Bruenger, C. Dzionk, R. Berger, H. Grimm, A.H. Dietzel, F. Letzkus, R. Springer

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	MNE 2001, Micro- and Nanoengineering
Place of Publication	France, Grenoble
Publication status	Published - 2001

Cite this

@inproceedings{d4e093cf3a9e493abd213c498a7a1164,

title = "Evaluation of Ion ProjectionUsing Heavy Ions Suitable for Resistless Patterning of Thin Magnetic Films",

author = "W.H. Bruenger and C. Dzionk and R. Berger and H. Grimm and A.H. Dietzel and F. Letzkus and R. Springer",

year = "2001",

language = "English",

booktitle = "MNE 2001, Micro- and Nanoengineering",

}

MNE 2001, Micro- and Nanoengineering. France, Grenoble, 2001.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review