Abstract
For performing electron-beam-induced current (EBIC) measurements on sufficiently large samples, the use of a ‘‘planar-collector geometry’’ (i.e., with the collector covering part of the irradiated surface itself) is very attractive. However, the pertinent theoretical EBIC curves for finite surface-recombination velocities s have so far been lacking. This paper presents the complete theoretical expressions for arbitrary values of s and diffusion length L. Simple asymptotic solutions are given for point- and finite-size generation sources. Easy methods are developed to facilitate the application of these solutions in the practical evaluation of L and s from experimental EBIC curves. These methods are applied to experimental data available through the literature.
Original language | English |
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Pages (from-to) | 2077-2090 |
Number of pages | 14 |
Journal | Journal of Applied Physics |
Volume | 57 |
Issue number | 6 |
DOIs | |
Publication status | Published - 1985 |