Evaluation of diffusion length and surface‐recombination velocity from a planar‐collector‐geometry electron‐beam‐induced current scan

H.K. Kuiken, C. Opdorp, van

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    Abstract

    For performing electron-beam-induced current (EBIC) measurements on sufficiently large samples, the use of a ‘‘planar-collector geometry’’ (i.e., with the collector covering part of the irradiated surface itself) is very attractive. However, the pertinent theoretical EBIC curves for finite surface-recombination velocities s have so far been lacking. This paper presents the complete theoretical expressions for arbitrary values of s and diffusion length L. Simple asymptotic solutions are given for point- and finite-size generation sources. Easy methods are developed to facilitate the application of these solutions in the practical evaluation of L and s from experimental EBIC curves. These methods are applied to experimental data available through the literature.
    Original languageEnglish
    Pages (from-to)2077-2090
    Number of pages14
    JournalJournal of Applied Physics
    Volume57
    Issue number6
    DOIs
    Publication statusPublished - 1985

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