Evaluating sharpness functions for automated scanning electron microscopy

Fast and reliable autofocus techniques are an important topic for automated scanning electron microscopy. In this paper, different autofocus techniques are discussed and applied to a variety of experimental through-focus series of scanning electron microscopy images with different geometries. The procedure of quality evaluation is described, and for a variety of scanning electron microscope samples it is demonstrated that techniques based on image derivatives and Fourier transforms are in general better than statistical, intensity and histogram-based techniques. Further, it is shown that varying of an extra parameter can dramatically increase quality of an autofocus technique.