Evaluating sharpness functions for automated scanning electron microscopy

M. Rudnaya, R.M.M. Mattheij, J.M.L. Maubach

Research output: Contribution to journalArticleAcademicpeer-review

24 Citations (Scopus)

Abstract

Fast and reliable autofocus techniques are an important topic for automated scanning electron microscopy. In this paper, different autofocus techniques are discussed and applied to a variety of experimental through-focus series of scanning electron microscopy images with different geometries. The procedure of quality evaluation is described, and for a variety of scanning electron microscope samples it is demonstrated that techniques based on image derivatives and Fourier transforms are in general better than statistical, intensity and histogram-based techniques. Further, it is shown that varying of an extra parameter can dramatically increase quality of an autofocus technique.
Original languageEnglish
Pages (from-to)38-49
JournalJournal of Microscopy
Volume240
Issue number1
DOIs
Publication statusPublished - 2010

Fingerprint

Dive into the research topics of 'Evaluating sharpness functions for automated scanning electron microscopy'. Together they form a unique fingerprint.

Cite this