EUV-induced Plasma, Electrostatics and Particle Contamination Control

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Applied Physics and Science Education
Supervisors/Advisors	Banine, Vadim Y., Promotor Kroesen, Gerrit M.W., Promotor
Award date	31 Aug 2021
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Publication status	Published - 31 Aug 2021

Proefschrift.

Access to Document

@phdthesis{7869ebc7fed247bb932038a4d86ac209,

title = "EUV-induced Plasma, Electrostatics and Particle Contamination Control",

author = "{van de Kerkhof}, {Marcus Adrianus}",

note = "Proefschrift.",

year = "2021",

month = aug,

day = "31",

language = "English",

publisher = "Technische Universiteit Eindhoven",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Applied Physics and Science Education",

}