Etching through a slit

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    21 Citations (Scopus)

    Abstract

    The problem of etching through a slit-shaped orifice is formulated in mathematical terms. Although a full solution to this problem can be obtained only by the application of numerical methods, it is shown that certain aspects of it can be dealt with by analytical means. Asymptotic solutions that are valid in certain parts of the time domain are derived. Early, intermediate and late asymptotes are considered. These analytical results are compared with numerical ones, and a satisfactory agreement is found, emphasizing the validity of the two approaches.
    Original languageEnglish
    Pages (from-to)95-117
    Number of pages23
    JournalProceedings of the Royal Society of London. Series A
    Volume396
    Issue number1810
    DOIs
    Publication statusPublished - 1984

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