Skip to main navigation Skip to search Skip to main content

Etching of III-V semiconductors : an electrochemical approach

  • P.H.L. Notten
  • , J.E.A.M. Meerakker, van de
  • , J.J. Kelly

Research output: Book/ReportBookAcademic

Original languageEnglish
Place of PublicationOxford
PublisherElsevier Advanced Technology
Number of pages349
ISBN (Print)0-946395-84-5
Publication statusPublished - 1991

Cite this