Etching of III-V semiconductors : an electrochemical approach

P.H.L. Notten, J.E.A.M. Meerakker, van de, J.J. Kelly

Research output: Book/ReportBookAcademic

Original languageEnglish
Place of PublicationOxford
PublisherElsevier Advanced Technology
Number of pages349
ISBN (Print)0-946395-84-5
Publication statusPublished - 1991

Cite this

Notten, P. H. L., Meerakker, van de, J. E. A. M., & Kelly, J. J. (1991). Etching of III-V semiconductors : an electrochemical approach. Elsevier Advanced Technology.