| Original language | English |
|---|---|
| Title of host publication | Conference Proceedings, Heavy Ion Beams, 1990 Materials Research Society |
| Pages | 103-117 |
| Publication status | Published - 1990 |
ERD in IC-related materials research
M.F.C. Willemsen, A.E.T. Kuiper, L.J. IJzendoorn, van, B. Faatz
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review