Equipment for atmospheric, spatial atomic layer deposition in roll-to-roll processes

R. Knaapen, P. Poodt, R. Olieslagers, A. Lankhorst, M. Van Den Boer, Dennis van den Berg, A. Van Asten, F. Roozeboom

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
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