Energy spread reduction using a laser-cooled ion source

M.P. Reijnders; N. Debernardi; S.B. Geer, van der; P.H.A. Mutsaers; E.J.D. Vredenbregt; O.J. Luiten

Energy spread reduction using a laser-cooled ion source

M.P. Reijnders
, N. Debernardi
, S.B. Geer, van der
, P.H.A. Mutsaers
, E.J.D. Vredenbregt
, O.J. Luiten

Coherence and Quantum Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Abstract

High brightness ion beams are used in applications such as focused ion beam systems, the preferred tool to mill and deposit material on nanometer scale. The smallest achievable spot size of focused ion beam technology is currently limited by chromatic aberrations in the lens column due to the energy spread of the industry standard liquid metal ions source (LMIS).

Original language	English
Title of host publication	13th ICIS International Conference on Ion Sources, Gatlinburg, Tennessee, USA, 21-25 September 2009
Pages	M6-144-
Publication status	Published - 2009

Cite this

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title = "Energy spread reduction using a laser-cooled ion source",

abstract = "High brightness ion beams are used in applications such as focused ion beam systems, the preferred tool to mill and deposit material on nanometer scale. The smallest achievable spot size of focused ion beam technology is currently limited by chromatic aberrations in the lens column due to the energy spread of the industry standard liquid metal ions source (LMIS).",

author = "M.P. Reijnders and N. Debernardi and \{Geer, van der\}, S.B. and P.H.A. Mutsaers and E.J.D. Vredenbregt and O.J. Luiten",

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T1 - Energy spread reduction using a laser-cooled ion source

AU - Reijnders, M.P.

AU - Debernardi, N.

AU - Geer, van der, S.B.

AU - Mutsaers, P.H.A.

AU - Vredenbregt, E.J.D.

AU - Luiten, O.J.

PY - 2009

Y1 - 2009

N2 - High brightness ion beams are used in applications such as focused ion beam systems, the preferred tool to mill and deposit material on nanometer scale. The smallest achievable spot size of focused ion beam technology is currently limited by chromatic aberrations in the lens column due to the energy spread of the industry standard liquid metal ions source (LMIS).

AB - High brightness ion beams are used in applications such as focused ion beam systems, the preferred tool to mill and deposit material on nanometer scale. The smallest achievable spot size of focused ion beam technology is currently limited by chromatic aberrations in the lens column due to the energy spread of the industry standard liquid metal ions source (LMIS).

M3 - Conference contribution

SP - M6-144-

BT - 13th ICIS International Conference on Ion Sources, Gatlinburg, Tennessee, USA, 21-25 September 2009

ER -

Energy spread reduction using a laser-cooled ion source

Abstract

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Cite this