Energy spread reduction using a laser-cooled ion source

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Abstract

High brightness ion beams are used in applications such as focused ion beam systems, the preferred tool to mill and deposit material on nanometer scale. The smallest achievable spot size of focused ion beam technology is currently limited by chromatic aberrations in the lens column due to the energy spread of the industry standard liquid metal ions source (LMIS).
Original languageEnglish
Title of host publication13th ICIS International Conference on Ion Sources, Gatlinburg, Tennessee, USA, 21-25 September 2009
PagesM6-144-
Publication statusPublished - 2009

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