Emission spectroscopy on a supersonically expanding argon/silane plasma

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	1st European workshop on plasma, ion, surface engineering (PISE), Toulouse, 5-7 juin 1991
Pages	350-355
Publication status	Published - 1991

Cite this

@inproceedings{93eb8c28a9dc4d72ac20d30a3276052f,

title = "Emission spectroscopy on a supersonically expanding argon/silane plasma",

author = "R.F.G. Meulenbroeks and G.J. Meeusen and E.A. Ershov-Pavlov and \{Sanden, van de\}, M.C.M. and D.C. Schram",

year = "1991",

language = "English",

pages = "350--355",

booktitle = "1st European workshop on plasma, ion, surface engineering (PISE), Toulouse, 5-7 juin 1991",

}

TY - GEN

T1 - Emission spectroscopy on a supersonically expanding argon/silane plasma

AU - Meulenbroeks, R.F.G.

AU - Meeusen, G.J.

AU - Ershov-Pavlov, E.A.

AU - Sanden, van de, M.C.M.

AU - Schram, D.C.

PY - 1991

Y1 - 1991

M3 - Conference contribution

SP - 350

EP - 355

BT - 1st European workshop on plasma, ion, surface engineering (PISE), Toulouse, 5-7 juin 1991

ER -