Emission spectroscopy on a supersonically expanding argon/silane plasma

G.J. Meeusen, E.A. Ershov-Pavlov, R.F.G. Meulenbroeks, M.C.M. van de Sanden , D.C. Schram

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Original languageEnglish
Title of host publicationISPC ... : international symposium on plasma chemistry, 10th, Bochum, August 4-9, 1991
EditorsU. Ehlemann, H.G. Lergon, K. Wiesemann
Place of Publications.l.
PublisherInternational Union of Pure and Applied Chemistry
Number of pages6
Volume1
Publication statusPublished - 1991
Event10th International Symposium on Plasma Chemistry (ISPC 10), August 4-9, 1991, Bochum, Germany - Bochum, Germany
Duration: 4 Aug 19919 Aug 1991

Other

Other10th International Symposium on Plasma Chemistry (ISPC 10), August 4-9, 1991, Bochum, Germany
Abbreviated titleISPC 10
CountryGermany
CityBochum
Period4/08/919/08/91

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