Emission spectroscopy on a supersonically expanding argon/silane plasma

G.J. Meeusen; E.A. Ershov-Pavlov; R.F.G. Meulenbroeks; M.C.M. van de Sanden; D.C. Schram

Emission spectroscopy on a supersonically expanding argon/silane plasma

G.J. Meeusen, E.A. Ershov-Pavlov, R.F.G. Meulenbroeks, M.C.M. van de Sanden , D.C. Schram

Applied Physics and Science Education

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Original language	English
Title of host publication	ISPC ... : international symposium on plasma chemistry, 10th, Bochum, August 4-9, 1991
Editors	U. Ehlemann, H.G. Lergon, K. Wiesemann
Place of Publication	s.l.
Publisher	International Union of Pure and Applied Chemistry
Number of pages	6
Volume	1
Publication status	Published - 1991
Event	10th International Symposium on Plasma Chemistry (ISPC 10), August 4-9, 1991, Bochum, Germany - Bochum, Germany Duration: 4 Aug 1991 → 9 Aug 1991

Other

Other	10th International Symposium on Plasma Chemistry (ISPC 10), August 4-9, 1991, Bochum, Germany
Abbreviated title	ISPC 10
Country/Territory	Germany
City	Bochum
Period	4/08/91 → 9/08/91

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Cite this

Meeusen, G. J., Ershov-Pavlov, E. A., Meulenbroeks, R. F. G., van de Sanden , M. C. M., & Schram, D. C. (1991). Emission spectroscopy on a supersonically expanding argon/silane plasma. In U. Ehlemann, H. G. Lergon, & K. Wiesemann (Eds.), ISPC ... : international symposium on plasma chemistry, 10th, Bochum, August 4-9, 1991 (Vol. 1). Article 1.2 International Union of Pure and Applied Chemistry.

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title = "Emission spectroscopy on a supersonically expanding argon/silane plasma",

author = "G.J. Meeusen and E.A. Ershov-Pavlov and R.F.G. Meulenbroeks and {van de Sanden}, M.C.M. and D.C. Schram",

year = "1991",

language = "English",

volume = "1",

editor = "U. Ehlemann and H.G. Lergon and K. Wiesemann",

booktitle = "ISPC ... : international symposium on plasma chemistry, 10th, Bochum, August 4-9, 1991",

publisher = "International Union of Pure and Applied Chemistry",

note = "10th International Symposium on Plasma Chemistry (ISPC 10), August 4-9, 1991, Bochum, Germany, ISPC 10 ; Conference date: 04-08-1991 Through 09-08-1991",

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Meeusen, GJ, Ershov-Pavlov, EA, Meulenbroeks, RFG, van de Sanden , MCM & Schram, DC 1991, Emission spectroscopy on a supersonically expanding argon/silane plasma. in U Ehlemann, HG Lergon & K Wiesemann (eds), ISPC ... : international symposium on plasma chemistry, 10th, Bochum, August 4-9, 1991. vol. 1, 1.2, International Union of Pure and Applied Chemistry, s.l., 10th International Symposium on Plasma Chemistry (ISPC 10), August 4-9, 1991, Bochum, Germany, Bochum, Germany, 4/08/91.

Emission spectroscopy on a supersonically expanding argon/silane plasma. / Meeusen, G.J.; Ershov-Pavlov, E.A.; Meulenbroeks, R.F.G. et al.
ISPC ... : international symposium on plasma chemistry, 10th, Bochum, August 4-9, 1991. ed. / U. Ehlemann; H.G. Lergon; K. Wiesemann. Vol. 1 s.l.: International Union of Pure and Applied Chemistry, 1991. 1.2.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Emission spectroscopy on a supersonically expanding argon/silane plasma

AU - Meeusen, G.J.

AU - Ershov-Pavlov, E.A.

AU - Meulenbroeks, R.F.G.

AU - van de Sanden , M.C.M.

AU - Schram, D.C.

PY - 1991

Y1 - 1991

M3 - Conference contribution

VL - 1

BT - ISPC ... : international symposium on plasma chemistry, 10th, Bochum, August 4-9, 1991

A2 - Ehlemann, U.

A2 - Lergon, H.G.

A2 - Wiesemann, K.

PB - International Union of Pure and Applied Chemistry

CY - s.l.

T2 - 10th International Symposium on Plasma Chemistry (ISPC 10), August 4-9, 1991, Bochum, Germany

Y2 - 4 August 1991 through 9 August 1991

ER -