Abstract
We have measured the transport and quantum mobility in Si delta doped samples as a function of the doping concentration and the thickness of the doping layer. The results are compared with mobility calculations which show that the ionized impurity scattering rate is determined by the fluctuations in the charge distribution of the delta layer instead of the full charge distribution itself.
Original language | English |
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Pages (from-to) | 462-465 |
Number of pages | 4 |
Journal | Physica B: Condensed Matter |
Volume | 211 |
Issue number | 1-4 |
DOIs | |
Publication status | Published - 1 May 1995 |