Electron energy distribution in a RF excited CF4 plasma

P.M. Vallinga; T.J. Bisschops; F.J. Hoog, de

Electron energy distribution in a RF excited CF4 plasma

P.M. Vallinga, T.J. Bisschops, F.J. Hoog, de

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Proceedings of the 17th International Conference on Phenomena in Ionised Gases (XVII ICPIG 1985) 8-12 July 1985, Budapest, Hungary
Editors	J.S. Bakos, Zsuzsa Sõrlei
Pages	E-13-333-335
Publication status	Published - 1985
Event	17th International Conference on Phenomena in Ionized Gases (ICPIG 1985), July 8-12, 1985, Budapest, Hungary - Budapest, Hungary Duration: 8 Jul 1985 → 12 Jul 1985

Conference

Conference	17th International Conference on Phenomena in Ionized Gases (ICPIG 1985), July 8-12, 1985, Budapest, Hungary
Abbreviated title	ICPIG 1985
Country/Territory	Hungary
City	Budapest
Period	8/07/85 → 12/07/85

Cite this

@inproceedings{98ac417a9e754ffa84e18adab3a133df,

title = "Electron energy distribution in a RF excited CF4 plasma",

author = "P.M. Vallinga and T.J. Bisschops and {Hoog, de}, F.J.",

year = "1985",

language = "English",

pages = "E--13--333--335",

editor = "J.S. Bakos and Zsuzsa S{\~o}rlei",

booktitle = "Proceedings of the 17th International Conference on Phenomena in Ionised Gases (XVII ICPIG 1985) 8-12 July 1985, Budapest, Hungary",

note = "17th International Conference on Phenomena in Ionized Gases (ICPIG 1985), July 8-12, 1985, Budapest, Hungary, ICPIG 1985 ; Conference date: 08-07-1985 Through 12-07-1985",

}

Vallinga, PM, Bisschops, TJ & Hoog, de, FJ 1985, Electron energy distribution in a RF excited CF4 plasma. in JS Bakos & Z Sõrlei (eds), Proceedings of the 17th International Conference on Phenomena in Ionised Gases (XVII ICPIG 1985) 8-12 July 1985, Budapest, Hungary. pp. E-13-333-335, 17th International Conference on Phenomena in Ionized Gases (ICPIG 1985), July 8-12, 1985, Budapest, Hungary, Budapest, Hungary, 8/07/85.

Electron energy distribution in a RF excited CF4 plasma. / Vallinga, P.M.; Bisschops, T.J.; Hoog, de, F.J.

Proceedings of the 17th International Conference on Phenomena in Ionised Gases (XVII ICPIG 1985) 8-12 July 1985, Budapest, Hungary. ed. / J.S. Bakos; Zsuzsa Sõrlei. 1985. p. E-13-333-335.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Electron energy distribution in a RF excited CF4 plasma

AU - Vallinga, P.M.

AU - Bisschops, T.J.

AU - Hoog, de, F.J.

PY - 1985

Y1 - 1985

M3 - Conference contribution

SP - E-13-333-335

BT - Proceedings of the 17th International Conference on Phenomena in Ionised Gases (XVII ICPIG 1985) 8-12 July 1985, Budapest, Hungary

A2 - Bakos, J.S.

A2 - Sõrlei, Zsuzsa

T2 - 17th International Conference on Phenomena in Ionized Gases (ICPIG 1985), July 8-12, 1985, Budapest, Hungary

Y2 - 8 July 1985 through 12 July 1985

ER -