@inproceedings{98ac417a9e754ffa84e18adab3a133df,
title = "Electron energy distribution in a RF excited CF4 plasma",
author = "P.M. Vallinga and T.J. Bisschops and {Hoog, de}, F.J.",
year = "1985",
language = "English",
pages = "E--13--333--335",
editor = "J.S. Bakos and Zsuzsa S{\~o}rlei",
booktitle = "Proceedings of the 17th International Conference on Phenomena in Ionised Gases (XVII ICPIG 1985) 8-12 July 1985, Budapest, Hungary",
note = "17th International Conference on Phenomena in Ionized Gases (ICPIG 1985), July 8-12, 1985, Budapest, Hungary, ICPIG 1985 ; Conference date: 08-07-1985 Through 12-07-1985",
}