Electron energy distribution in a RF excited CF4 plasma

P.M. Vallinga, T.J. Bisschops, F.J. Hoog, de

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationProceedings of the 17th International Conference on Phenomena in Ionised Gases (XVII ICPIG 1985) 8-12 July 1985, Budapest, Hungary
EditorsJ.S. Bakos, Zsuzsa Sõrlei
PagesE-13-333-335
Publication statusPublished - 1985
Event17th International Conference on Phenomena in Ionized Gases (ICPIG 1985), July 8-12, 1985, Budapest, Hungary - Budapest, Hungary
Duration: 8 Jul 198512 Jul 1985

Conference

Conference17th International Conference on Phenomena in Ionized Gases (ICPIG 1985), July 8-12, 1985, Budapest, Hungary
Abbreviated titleICPIG 1985
CountryHungary
CityBudapest
Period8/07/8512/07/85

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