Electron energy distribution in a RF excited CF4 plasma

P.M. Vallinga, T.J. Bisschops, F.J. Hoog, de

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationProceedings of the 17th International Conference on Phenomena in Ionised Gases (XVII ICPIG 1985) 8-12 July 1985, Budapest, Hungary
EditorsJ.S. Bakos, Zsuzsa Sõrlei
PagesE-13-333-335
Publication statusPublished - 1985
Event17th International Conference on Phenomena in Ionized Gases (ICPIG 1985), July 8-12, 1985, Budapest, Hungary - Budapest, Hungary
Duration: 8 Jul 198512 Jul 1985

Conference

Conference17th International Conference on Phenomena in Ionized Gases (ICPIG 1985), July 8-12, 1985, Budapest, Hungary
Abbreviated titleICPIG 1985
CountryHungary
CityBudapest
Period8/07/8512/07/85

Cite this

Vallinga, P. M., Bisschops, T. J., & Hoog, de, F. J. (1985). Electron energy distribution in a RF excited CF4 plasma. In J. S. Bakos, & Z. Sõrlei (Eds.), Proceedings of the 17th International Conference on Phenomena in Ionised Gases (XVII ICPIG 1985) 8-12 July 1985, Budapest, Hungary (pp. E-13-333-335)
Vallinga, P.M. ; Bisschops, T.J. ; Hoog, de, F.J. / Electron energy distribution in a RF excited CF4 plasma. Proceedings of the 17th International Conference on Phenomena in Ionised Gases (XVII ICPIG 1985) 8-12 July 1985, Budapest, Hungary. editor / J.S. Bakos ; Zsuzsa Sõrlei. 1985. pp. E-13-333-335
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title = "Electron energy distribution in a RF excited CF4 plasma",
author = "P.M. Vallinga and T.J. Bisschops and {Hoog, de}, F.J.",
year = "1985",
language = "English",
pages = "E--13--333--335",
editor = "J.S. Bakos and Zsuzsa S{\~o}rlei",
booktitle = "Proceedings of the 17th International Conference on Phenomena in Ionised Gases (XVII ICPIG 1985) 8-12 July 1985, Budapest, Hungary",

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Vallinga, PM, Bisschops, TJ & Hoog, de, FJ 1985, Electron energy distribution in a RF excited CF4 plasma. in JS Bakos & Z Sõrlei (eds), Proceedings of the 17th International Conference on Phenomena in Ionised Gases (XVII ICPIG 1985) 8-12 July 1985, Budapest, Hungary. pp. E-13-333-335, 17th International Conference on Phenomena in Ionized Gases (ICPIG 1985), July 8-12, 1985, Budapest, Hungary, Budapest, Hungary, 8/07/85.

Electron energy distribution in a RF excited CF4 plasma. / Vallinga, P.M.; Bisschops, T.J.; Hoog, de, F.J.

Proceedings of the 17th International Conference on Phenomena in Ionised Gases (XVII ICPIG 1985) 8-12 July 1985, Budapest, Hungary. ed. / J.S. Bakos; Zsuzsa Sõrlei. 1985. p. E-13-333-335.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Electron energy distribution in a RF excited CF4 plasma

AU - Vallinga, P.M.

AU - Bisschops, T.J.

AU - Hoog, de, F.J.

PY - 1985

Y1 - 1985

M3 - Conference contribution

SP - E-13-333-335

BT - Proceedings of the 17th International Conference on Phenomena in Ionised Gases (XVII ICPIG 1985) 8-12 July 1985, Budapest, Hungary

A2 - Bakos, J.S.

A2 - Sõrlei, Zsuzsa

ER -

Vallinga PM, Bisschops TJ, Hoog, de FJ. Electron energy distribution in a RF excited CF4 plasma. In Bakos JS, Sõrlei Z, editors, Proceedings of the 17th International Conference on Phenomena in Ionised Gases (XVII ICPIG 1985) 8-12 July 1985, Budapest, Hungary. 1985. p. E-13-333-335