Electron energy distribution function close to the mode transition region in an inductively coupled gaseous electronics conference reference cell

S.V. Singh, P. Kempkes, H. Soltwisch

Research output: Contribution to journalArticleAcademicpeer-review

33 Citations (Scopus)
211 Downloads (Pure)

Fingerprint

Dive into the research topics of 'Electron energy distribution function close to the mode transition region in an inductively coupled gaseous electronics conference reference cell'. Together they form a unique fingerprint.

Physics