Electron energy distribution function close to the mode transition region in an inductively coupled gaseous electronics conference reference cell

S.V. Singh, P. Kempkes, H. Soltwisch

Research output: Contribution to journalArticleAcademicpeer-review

32 Citations (Scopus)
112 Downloads (Pure)

Abstract

The electron energy distribution function (EEDF) in the E to H mode transition region of an inductively coupled argon discharge has been studied experimentally. The EEDF, which has a Maxwellian- or Druyvesteyn-like shape (depending on pressure) in both "pure" modes, shows a trend to a bi-Maxwellian shape in the vicinity of both the E to H and the H to E mode transitions. Moreover, the normalized electron energy probability functions closely before the E to H and the reverse H to E mode jumps are almost identical, indicating a similar power coupling at both transition points. ©2006 American Institute of Physics
Original languageEnglish
Article number161501
Pages (from-to)161501-1/3
Number of pages3
JournalApplied Physics Letters
Volume89
Issue number16
DOIs
Publication statusPublished - 2006

Fingerprint

Dive into the research topics of 'Electron energy distribution function close to the mode transition region in an inductively coupled gaseous electronics conference reference cell'. Together they form a unique fingerprint.

Cite this