Electron dynamics in EUV-induced plasmas

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Applied Physics and Science Education
Supervisors/Advisors	Banine, Vadim Y., Promotor Kroesen, Gerrit M.W., Promotor Beckers, Job, Copromotor
Thesis sponsors	ASML Netherlands
Award date	19 Nov 2015
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	978-90-386-3947-5
Publication status	Published - 19 Nov 2015

Proefschrift. Embargo tot 19-11-2017.

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@phdthesis{b31d702b566d4200bdb0fe4ba5df8980,

title = "Electron dynamics in EUV-induced plasmas",

author = "\{Horst, van der\}, R.M.",

note = "Proefschrift. Embargo tot 19-11-2017.",

year = "2015",

month = nov,

day = "19",

language = "English",

isbn = "978-90-386-3947-5",

publisher = "Technische Universiteit Eindhoven",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Applied Physics and Science Education",

}