| Original language | English |
|---|---|
| Title of host publication | ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1 |
| Editors | K. Akashi, A. Kinbara |
| Place of Publication | Tokyo |
| Pages | 620-624 |
| Publication status | Published - 1987 |
Cite this
Bisschops, T. H. J., Flipsen, R. F., & Schram, D. C. (1987). Electron densities in an RF etch plasma. In K. Akashi, & A. Kinbara (Eds.), ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1 (pp. 620-624). Tokyo.
@inproceedings{63af9ffa09404141b6159b232d83fb45,
title = "Electron densities in an RF etch plasma",
author = "T.H.J. Bisschops and R.F. Flipsen and D.C. Schram",
year = "1987",
language = "English",
pages = "620--624",
editor = "K. Akashi and A. Kinbara",
booktitle = "ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1",
}
Bisschops, THJ, Flipsen, RF & Schram, DC 1987, Electron densities in an RF etch plasma. in K Akashi & A Kinbara (eds), ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1 . Tokyo, pp. 620-624.
Electron densities in an RF etch plasma. / Bisschops, T.H.J.; Flipsen, R.F.; Schram, D.C.
ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1 . ed. / K. Akashi; A. Kinbara. Tokyo, 1987. p. 620-624.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic
TY - GEN
T1 - Electron densities in an RF etch plasma
AU - Bisschops, T.H.J.
AU - Flipsen, R.F.
AU - Schram, D.C.
PY - 1987
Y1 - 1987
M3 - Conference contribution
SP - 620
EP - 624
BT - ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1
A2 - Akashi, K.
A2 - Kinbara, A.
CY - Tokyo
ER -
Bisschops THJ, Flipsen RF, Schram DC. Electron densities in an RF etch plasma. In Akashi K, Kinbara A, editors, ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1 . Tokyo. 1987. p. 620-624