Electron beam evaporated molybdenum oxide as hole-selective contact in 6-inch c-Si heterojunction solar cells

Mike Ah Sen, Pierpaolo Spinelli, Benjamin Kikkert, Eelko Hoek, Bart Macco, Arthur Weeber, Paula Bronsveld

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)

Abstract

Electron beam (E-beam) deposited molybdenum oxide (MoOx) has been investigated for its potential to replace p-type hydrogenated amorphous silicon (a-Si:H) in Si heterojunction (SHJ) solar cells. Excellent passivation was achieved for our best MoOx/c-Si junction based device, reaching an average implied Voc (iVoc) of 734 mV on textured, commercially available 6-inch Cz wafers. This confirms the compatibility of MoOx as a hole selective layer with industrial SHJ cell processing. A hole barrier was, however, observed for our MoOx-based solar cells due to inefficient hole extraction. The formation of this hole barrier can be related to annealing of MoOx and the presence of a native oxide grown on the intrinsic a-Si:H interface layer below. Pre-annealing, followed by an HF treatment on the a-Si:H(i) layer prior to MoOx deposition, proved to be useful to mitigate the formed barrier, while making it more stable under standard SHJ annealing conditions.

Original languageEnglish
Title of host publicationSiliconPV 2018, the 8th International Conference on Crystalline Silicon Photovoltaics
PublisherAmerican Institute of Physics
ISBN (Print)9780735417151
DOIs
Publication statusPublished - 10 Aug 2018
EventSiliconPV 2018: The 8th International Conference on Crystalline Silicon Photovoltaics - Lausanne, Switzerland
Duration: 19 Mar 201821 Mar 2018

Publication series

NameAIP Conference Proceedings
Volume1999

Conference

ConferenceSiliconPV 2018: The 8th International Conference on Crystalline Silicon Photovoltaics
CountrySwitzerland
CityLausanne
Period19/03/1821/03/18

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Sen, M. A., Spinelli, P., Kikkert, B., Hoek, E., Macco, B., Weeber, A., & Bronsveld, P. (2018). Electron beam evaporated molybdenum oxide as hole-selective contact in 6-inch c-Si heterojunction solar cells. In SiliconPV 2018, the 8th International Conference on Crystalline Silicon Photovoltaics [040001] (AIP Conference Proceedings; Vol. 1999). American Institute of Physics. https://doi.org/10.1063/1.5049264