Electron attachment to electronegative gases in an RF plasma

W.W. Stoffels, E. Stoffels - Adamowicz, G.M.W. Kroesen, F.J. Hoog, de

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationProceedings II of the XXI International Conference on Phenomena in Ionized Gases (ICPIG), September 19-24, 1993, Ruhr-Universität Bochum
EditorsG. Ecker, U. Arendt, J. Böseler
PublisherArbeitsgemeinschaft Plasmaphysik
Pages25-26
Publication statusPublished - 1993
Event21st International Conference on Phenomena in Ionized Gases (ICPIG 1993); September 19-24, 1993, Bochum, Germany - Bochum, Germany
Duration: 19 Sep 199324 Sep 1993

Conference

Conference21st International Conference on Phenomena in Ionized Gases (ICPIG 1993); September 19-24, 1993, Bochum, Germany
Abbreviated titleICPIG 1993
CountryGermany
CityBochum
Period19/09/9324/09/93

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