Electron and negative ion densities in a 13.56MHz CCI2F2 RF plasma

W.W. Stoffels; E. Stoffels - Adamowicz; G.M.W. Kroesen; F.J. Hoog, de

Electron and negative ion densities in a 13.56MHz CCI2F2 RF plasma

W.W. Stoffels, E. Stoffels - Adamowicz, G.M.W. Kroesen, F.J. Hoog, de

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Original language	English
Title of host publication	Proceedings II of the XXI International Conference on Phenomena in Ionized Gases (ICPIG), September 19-24, 1993, Ruhr-Universität Bochum
Editors	G. Ecker, U. Arendt, J. Böseler
Publisher	Arbeitsgemeinschaft Plasmaphysik
Pages	247-248
Publication status	Published - 1993
Event	21st International Conference on Phenomena in Ionized Gases (ICPIG 1993); September 19-24, 1993, Bochum, Germany - Bochum, Germany Duration: 19 Sept 1993 → 24 Sept 1993

Conference

Conference	21st International Conference on Phenomena in Ionized Gases (ICPIG 1993); September 19-24, 1993, Bochum, Germany
Abbreviated title	ICPIG 1993
Country/Territory	Germany
City	Bochum
Period	19/09/93 → 24/09/93

Cite this

Stoffels, W. W., Stoffels - Adamowicz, E., Kroesen, G. M. W., & Hoog, de, F. J. (1993). Electron and negative ion densities in a 13.56MHz CCI2F2 RF plasma. In G. Ecker, U. Arendt, & J. Böseler (Eds.), Proceedings II of the XXI International Conference on Phenomena in Ionized Gases (ICPIG), September 19-24, 1993, Ruhr-Universität Bochum (pp. 247-248). Arbeitsgemeinschaft Plasmaphysik.

Stoffels, W.W. ; Stoffels - Adamowicz, E. ; Kroesen, G.M.W. et al. / Electron and negative ion densities in a 13.56MHz CCI2F2 RF plasma. Proceedings II of the XXI International Conference on Phenomena in Ionized Gases (ICPIG), September 19-24, 1993, Ruhr-Universität Bochum. editor / G. Ecker ; U. Arendt ; J. Böseler. Arbeitsgemeinschaft Plasmaphysik, 1993. pp. 247-248

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title = "Electron and negative ion densities in a 13.56MHz CCI2F2 RF plasma",

author = "W.W. Stoffels and {Stoffels - Adamowicz}, E. and G.M.W. Kroesen and {Hoog, de}, F.J.",

year = "1993",

language = "English",

pages = "247--248",

editor = "G. Ecker and U. Arendt and J. B{\"o}seler",

booktitle = "Proceedings II of the XXI International Conference on Phenomena in Ionized Gases (ICPIG), September 19-24, 1993, Ruhr-Universit{\"a}t Bochum",

publisher = "Arbeitsgemeinschaft Plasmaphysik",

note = "21st International Conference on Phenomena in Ionized Gases (ICPIG 1993); September 19-24, 1993, Bochum, Germany, ICPIG 1993 ; Conference date: 19-09-1993 Through 24-09-1993",

}

Stoffels, WW, Stoffels - Adamowicz, E, Kroesen, GMW & Hoog, de, FJ 1993, Electron and negative ion densities in a 13.56MHz CCI2F2 RF plasma. in G Ecker, U Arendt & J Böseler (eds), Proceedings II of the XXI International Conference on Phenomena in Ionized Gases (ICPIG), September 19-24, 1993, Ruhr-Universität Bochum. Arbeitsgemeinschaft Plasmaphysik, pp. 247-248, 21st International Conference on Phenomena in Ionized Gases (ICPIG 1993); September 19-24, 1993, Bochum, Germany, Bochum, Germany, 19/09/93.

Electron and negative ion densities in a 13.56MHz CCI2F2 RF plasma. / Stoffels, W.W.; Stoffels - Adamowicz, E.; Kroesen, G.M.W. et al.
Proceedings II of the XXI International Conference on Phenomena in Ionized Gases (ICPIG), September 19-24, 1993, Ruhr-Universität Bochum. ed. / G. Ecker; U. Arendt; J. Böseler. Arbeitsgemeinschaft Plasmaphysik, 1993. p. 247-248.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Electron and negative ion densities in a 13.56MHz CCI2F2 RF plasma

AU - Stoffels, W.W.

AU - Stoffels - Adamowicz, E.

AU - Kroesen, G.M.W.

AU - Hoog, de, F.J.

PY - 1993

Y1 - 1993

M3 - Conference contribution

SP - 247

EP - 248

BT - Proceedings II of the XXI International Conference on Phenomena in Ionized Gases (ICPIG), September 19-24, 1993, Ruhr-Universität Bochum

A2 - Ecker, G.

A2 - Arendt, U.

A2 - Böseler, J.

PB - Arbeitsgemeinschaft Plasmaphysik

T2 - 21st International Conference on Phenomena in Ionized Gases (ICPIG 1993); September 19-24, 1993, Bochum, Germany

Y2 - 19 September 1993 through 24 September 1993

ER -