Abstract
We present the design, fabrication and characterization of double-membrane photonic crystal cavities electromechanically tunable over >10 nm, and their application in integrated quantum photonics.
Original language | English |
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Title of host publication | OMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings, 2-5 August 2015, Jerusalem, Israel |
Place of Publication | Brussels |
Publisher | IEEE Computer Society |
Number of pages | 1 |
ISBN (Electronic) | 978-1-4673-6835-3 |
ISBN (Print) | 978-1-4673-6834-6 |
DOIs | |
Publication status | Published - 2 Oct 2015 |
Event | International Conference on Optical MEMS and Nanophotonics, OMN 2015 - Jerusalem, Israel Duration: 2 Aug 2015 → 5 Aug 2015 |
Conference
Conference | International Conference on Optical MEMS and Nanophotonics, OMN 2015 |
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Country/Territory | Israel |
City | Jerusalem |
Period | 2/08/15 → 5/08/15 |
Keywords
- NOEMS
- Photonic crystal cavities