Electro-Optic Slot Waveguide Phase Modulator on the InP Membrane on Silicon Platform

Amir Abbas Kashi (Corresponding author), Jos J.G.M. van der Tol, Kevin A. Williams, Weiming Yao, Michael S. Lebby, Cory Pecinovsky, Yuqing Jiao

Research output: Contribution to journalArticleAcademicpeer-review

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For the first time, we present an electro-optic slot waveguide phase modulator on the InP membrane on Silicon (IMOS) platform. Low-frequency characterization of this modulator shows that it can achieve a {V}-{ {pi }} {L}-{ {pi }} product as low as 4.5 V.mm and an extinction ratio equal to 10.6 dB. The 3-dB optical bandwidth of this modulator is measured to be 10.5 GHz. Here, working principles, design, fabrication, measurements, analysis of the electrical and electro-optic performance and prospects of this modulator are presented.

Original languageEnglish
Article number9277600
Number of pages10
JournalIEEE Journal of Quantum Electronics
Issue number1
Publication statusPublished - Feb 2021


  • electrooptic modulators
  • integrated optics
  • optical communication
  • Optical device fabrication
  • optical modulation
  • optical polymers


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