Electrical characterization of InP surface damages induced by ECR dry etching

M. Silova, E. Smalbrugge, B.H. Roy, van, F. Karouta

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Proc. 4th Annual Symposium of the IEEE/LEOS Benelux Chapter
Pages	127-130
Publication status	Published - 1999
Event	4th Annual Symposium of the IEEE/LEOS Benelux Chapter, 1999 - Mons, Belgium Duration: 15 Nov 1999 → 15 Nov 1999

Conference	4th Annual Symposium of the IEEE/LEOS Benelux Chapter, 1999
Country/Territory	Belgium
City	Mons
Period	15/11/99 → 15/11/99

Cite this

@inproceedings{e55706da655644a39491350fff098d3e,

title = "Electrical characterization of InP surface damages induced by ECR dry etching",

author = "M. Silova and E. Smalbrugge and {Roy, van}, B.H. and F. Karouta",

year = "1999",

language = "English",

pages = "127--130",

booktitle = "Proc. 4th Annual Symposium of the IEEE/LEOS Benelux Chapter",

note = "4th Annual Symposium of the IEEE/LEOS Benelux Chapter, 1999 ; Conference date: 15-11-1999 Through 15-11-1999",

}

TY - GEN

T1 - Electrical characterization of InP surface damages induced by ECR dry etching

AU - Silova, M.

AU - Smalbrugge, E.

AU - Roy, van, B.H.

AU - Karouta, F.

PY - 1999

Y1 - 1999

M3 - Conference contribution

SP - 127

EP - 130

BT - Proc. 4th Annual Symposium of the IEEE/LEOS Benelux Chapter

T2 - 4th Annual Symposium of the IEEE/LEOS Benelux Chapter, 1999

Y2 - 15 November 1999 through 15 November 1999

ER -