Abstract
In this paper, we present the fabrication and characterization of highly flexible indium-gallium-zinc-oxide (IGZO)-based thin-film transistors (TFTs) and integrated circuits on a transparent and thin polymer substrate. Mechanical reliability tests are performed under bending conditions down to a bending radius of 2 mm. All the TFT parameters show only a weak dependence on mechanical strain. TFTs can withstand bending strain up to 0.75% without any significant change in the device operation. Mechanical reliability is further demonstrated to a higher TFT integration level by ring oscillators and 8-b transponder chips operating at a bending radius of 2 mm.
Original language | English |
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Article number | 7323805 |
Pages (from-to) | 4063-4068 |
Number of pages | 6 |
Journal | IEEE Transactions on Electron Devices |
Volume | 62 |
Issue number | 12 |
DOIs | |
Publication status | Published - 10 Nov 2015 |
Keywords
- Flexible circuits
- flexible displays
- indium-gallium-zinc oxide (IGZO)
- mechanical reliability
- adio-Frequency identification