Argon micro-cell plasma (MCP) is believed to be a viable tool for performing micro-surgery. The non-thermal nature of the discharge allows an effective treatment of pathological tissue without causing thermal damage to its surroundings. This bio-medical application imposes a number of design challenges on the plasma configuration which we will address by computer-aided source design.
In this contribution we present a numerical study with the Relaxation ConTinuum model (RCT) [1-2] of the characteristics of an atmospheric argon MCP which is maintained by an RF source. The focus will be on the influence of the geometry and the externally applied RF amplitude and frequency on the plasma properties. In particular, attention will be paid to the effect of pulsed-mode operation on the gas temperature. In addition, the influence of the frequency and the field in the wall sheath on the losses of the plasma species to the cell walls by drift-diffusion processes will be considered.
 K. Okazaki, T. Makabe and Y. Yamaguchi, Appl. Phys. Lett. (54), 1742 (1989)  T. Makabe, "Advances in Low Temperature RF Plasmas" Elsevier, (2002)
|Title of host publication||Proceedings of the 56th Annual Gaseous Electronics Conference 2003 (GEC 2003), 21-24 October, 2003, San Francisco, USA|
|Place of Publication||San Francisco, United Stated|
|Publisher||American Physical Society|
|Publication status||Published - 2003|
|Name||Bulletin of the American Physical Society|