Elastic recoil selection by pulse shape analysis

S. S. Klein; H. A. Rijken; H. P.T. Tolsma; M. J.A. de Voigt

doi:10.1016/0168-583X(94)95901-3

Elastic recoil selection by pulse shape analysis

S. S. Klein
, H. A. Rijken
, H. P.T. Tolsma
, M. J.A. de Voigt

Coherence and Quantum Technology

Research output: Contribution to journal › Article › Academic › peer-review

4 Citations (Scopus)

Abstract

Recoils ejected by α-particles are detected by low-resistivity detectors at low bias. Pulses from scattered α-particles that cross the depletion layer are rejected by pulse shape analysis. Using 500 Ω cm detectors the maximum pulse height recorded for α-particles corresponds to an energy of 4 MeV. Further suppression of pulses caused by α-particles awaits the construction of detectors optimized for operation at low bias as well as the development of faster electronics. Using a 13.4 MeV α-particle beam oxygen has been detected from layers as deep as 250 nm. Sensitivity was improved to 5 × 10¹⁴ atoms cm² and a surface depth resolution of 12 nm was obtained for N in Si₂N_0.86O₃. The depth range and sensitivity may be further improved using higher bombarding energies.

Original language	English
Pages (from-to)	660-663
Number of pages	4
Journal	Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume	85
Issue number	1-4
DOIs	https://doi.org/10.1016/0168-583X(94)95901-3
Publication status	Published - 2 Mar 1994

Access to Document

10.1016/0168-583X(94)95901-3

Cite this

@article{083aa597e11847008be7fe7e17d2bafe,

title = "Elastic recoil selection by pulse shape analysis",

abstract = "Recoils ejected by α-particles are detected by low-resistivity detectors at low bias. Pulses from scattered α-particles that cross the depletion layer are rejected by pulse shape analysis. Using 500 Ω cm detectors the maximum pulse height recorded for α-particles corresponds to an energy of 4 MeV. Further suppression of pulses caused by α-particles awaits the construction of detectors optimized for operation at low bias as well as the development of faster electronics. Using a 13.4 MeV α-particle beam oxygen has been detected from layers as deep as 250 nm. Sensitivity was improved to 5 × 1014 atoms cm2 and a surface depth resolution of 12 nm was obtained for N in Si2N0.86O3. The depth range and sensitivity may be further improved using higher bombarding energies.",

author = "Klein, \{S. S.\} and Rijken, \{H. A.\} and Tolsma, \{H. P.T.\} and \{de Voigt\}, \{M. J.A.\}",

year = "1994",

month = mar,

day = "2",

doi = "10.1016/0168-583X(94)95901-3",

language = "English",

volume = "85",

pages = "660--663",

journal = "Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier B.V.",

number = "1-4",

}

TY - JOUR

T1 - Elastic recoil selection by pulse shape analysis

AU - Klein, S. S.

AU - Rijken, H. A.

AU - Tolsma, H. P.T.

AU - de Voigt, M. J.A.

PY - 1994/3/2

Y1 - 1994/3/2

N2 - Recoils ejected by α-particles are detected by low-resistivity detectors at low bias. Pulses from scattered α-particles that cross the depletion layer are rejected by pulse shape analysis. Using 500 Ω cm detectors the maximum pulse height recorded for α-particles corresponds to an energy of 4 MeV. Further suppression of pulses caused by α-particles awaits the construction of detectors optimized for operation at low bias as well as the development of faster electronics. Using a 13.4 MeV α-particle beam oxygen has been detected from layers as deep as 250 nm. Sensitivity was improved to 5 × 1014 atoms cm2 and a surface depth resolution of 12 nm was obtained for N in Si2N0.86O3. The depth range and sensitivity may be further improved using higher bombarding energies.

AB - Recoils ejected by α-particles are detected by low-resistivity detectors at low bias. Pulses from scattered α-particles that cross the depletion layer are rejected by pulse shape analysis. Using 500 Ω cm detectors the maximum pulse height recorded for α-particles corresponds to an energy of 4 MeV. Further suppression of pulses caused by α-particles awaits the construction of detectors optimized for operation at low bias as well as the development of faster electronics. Using a 13.4 MeV α-particle beam oxygen has been detected from layers as deep as 250 nm. Sensitivity was improved to 5 × 1014 atoms cm2 and a surface depth resolution of 12 nm was obtained for N in Si2N0.86O3. The depth range and sensitivity may be further improved using higher bombarding energies.

UR - https://www.scopus.com/pages/publications/4244040556

U2 - 10.1016/0168-583X(94)95901-3

DO - 10.1016/0168-583X(94)95901-3

M3 - Article

AN - SCOPUS:4244040556

SN - 0168-583X

VL - 85

SP - 660

EP - 663

JO - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

IS - 1-4

ER -

Elastic recoil selection by pulse shape analysis

Abstract

Access to Document

Other files and links

Fingerprint

Cite this