Elastic recoil detection of light elements (C, N, O) with high energy (10-15 MeV) He beams

L.J. van IJzendoorn, H.A. Rijken, S.S. Klein, M.J.A. De Voigt

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)

Abstract

Elastic recoil detection (ERD) of carbon, nitrogen and oxygen from thin films on thick substrates was demonstrated using 10-15 MeV He2+ ions and thin films detectors. Non-Rutherford scattering was used to alter the relative sensitivities for carbon, nitrogen and oxygen by selecting specific recoil angles and incident energies. A depth resolution of 15 nm near the surface can be easily achieved as well as probing depths up to approximately 500 nm.

Original languageEnglish
Pages (from-to)58-62
Number of pages5
JournalApplied Surface Science
Volume70-71
Issue numberPART 1
DOIs
Publication statusPublished - 2 Jun 1993

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