TY - JOUR
T1 - Elastic recoil detection of light elements (C, N, O) with high energy (10-15 MeV) He beams
AU - van IJzendoorn, L.J.
AU - Rijken, H.A.
AU - Klein, S.S.
AU - De Voigt, M.J.A.
PY - 1993/6/2
Y1 - 1993/6/2
N2 - Elastic recoil detection (ERD) of carbon, nitrogen and oxygen from thin films on thick substrates was demonstrated using 10-15 MeV He2+ ions and thin films detectors. Non-Rutherford scattering was used to alter the relative sensitivities for carbon, nitrogen and oxygen by selecting specific recoil angles and incident energies. A depth resolution of 15 nm near the surface can be easily achieved as well as probing depths up to approximately 500 nm.
AB - Elastic recoil detection (ERD) of carbon, nitrogen and oxygen from thin films on thick substrates was demonstrated using 10-15 MeV He2+ ions and thin films detectors. Non-Rutherford scattering was used to alter the relative sensitivities for carbon, nitrogen and oxygen by selecting specific recoil angles and incident energies. A depth resolution of 15 nm near the surface can be easily achieved as well as probing depths up to approximately 500 nm.
UR - http://www.scopus.com/inward/record.url?scp=0027905872&partnerID=8YFLogxK
U2 - 10.1016/0169-4332(93)90398-U
DO - 10.1016/0169-4332(93)90398-U
M3 - Article
AN - SCOPUS:0027905872
VL - 70-71
SP - 58
EP - 62
JO - Applied Surface Science
JF - Applied Surface Science
SN - 0169-4332
IS - PART 1
ER -