Abstract
Elastic recoil detection (ERD) of carbon, nitrogen and oxygen from thin films on thick substrates was demonstrated using 10-15 MeV He2+ ions and thin films detectors. Non-Rutherford scattering was used to alter the relative sensitivities for carbon, nitrogen and oxygen by selecting specific recoil angles and incident energies. A depth resolution of 15 nm near the surface can be easily achieved as well as probing depths up to approximately 500 nm.
| Original language | English |
|---|---|
| Pages (from-to) | 58-62 |
| Number of pages | 5 |
| Journal | Applied Surface Science |
| Volume | 70-71 |
| Issue number | PART 1 |
| DOIs | |
| Publication status | Published - 2 Jun 1993 |
Fingerprint Dive into the research topics of 'Elastic recoil detection of light elements (C, N, O) with high energy (10-15 MeV) He beams'. Together they form a unique fingerprint.
Cite this
van IJzendoorn, L. J., Rijken, H. A., Klein, S. S., & De Voigt, M. J. A. (1993). Elastic recoil detection of light elements (C, N, O) with high energy (10-15 MeV) He beams. Applied Surface Science, 70-71(PART 1), 58-62. https://doi.org/10.1016/0169-4332(93)90398-U